JPS6218032Y2 - - Google Patents
Info
- Publication number
- JPS6218032Y2 JPS6218032Y2 JP2870680U JP2870680U JPS6218032Y2 JP S6218032 Y2 JPS6218032 Y2 JP S6218032Y2 JP 2870680 U JP2870680 U JP 2870680U JP 2870680 U JP2870680 U JP 2870680U JP S6218032 Y2 JPS6218032 Y2 JP S6218032Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- tube
- core tube
- temperature
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 8
- 238000009529 body temperature measurement Methods 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 238000002791 soaking Methods 0.000 description 10
- 239000004020 conductor Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2870680U JPS6218032Y2 (enrdf_load_stackoverflow) | 1980-03-05 | 1980-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2870680U JPS6218032Y2 (enrdf_load_stackoverflow) | 1980-03-05 | 1980-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56132745U JPS56132745U (enrdf_load_stackoverflow) | 1981-10-08 |
| JPS6218032Y2 true JPS6218032Y2 (enrdf_load_stackoverflow) | 1987-05-09 |
Family
ID=29624625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2870680U Expired JPS6218032Y2 (enrdf_load_stackoverflow) | 1980-03-05 | 1980-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218032Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-03-05 JP JP2870680U patent/JPS6218032Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56132745U (enrdf_load_stackoverflow) | 1981-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR940010643B1 (ko) | 반도체 웨이퍼의 처리방법 및 장치 | |
| JP3380668B2 (ja) | 温度調整方法、温度調整装置及び熱処理装置 | |
| JP2824003B2 (ja) | 基板の温度測定装置 | |
| JP4426024B2 (ja) | 熱処理装置の温度校正方法 | |
| JPH113868A (ja) | ランプアニール装置およびランプアニール方法 | |
| JPS6218032Y2 (enrdf_load_stackoverflow) | ||
| KR20030076382A (ko) | 열처리 방법 및 열처리 장치 | |
| JPH03145121A (ja) | 半導体熱処理用温度制御装置 | |
| JPH11142469A (ja) | 低高温電気特性測定方法および装置 | |
| JPH09145491A (ja) | 熱処理炉の温度制御装置 | |
| JPH01282620A (ja) | 半導体処理炉用温度制御装置 | |
| JPH05267200A (ja) | 半導体熱処理装置 | |
| JP3039478B2 (ja) | ろう付け炉の温度制御方法、ろう付け装置およびシステム | |
| JPH10206020A (ja) | 熱処理設備の温度制御装置及び温度制御方法 | |
| JP3130908B2 (ja) | 基板用熱処理炉の温度測定方法 | |
| JPH1019687A (ja) | 半導体素子製造用拡散炉のプロセス温度検出方法及びその装置 | |
| JPH04171920A (ja) | 熱処理装置 | |
| JPS56160668A (en) | Device for eliminating defective semiconductor device | |
| JPS6220438Y2 (enrdf_load_stackoverflow) | ||
| JP3178518B2 (ja) | リードフレームの加熱装置 | |
| SU1218499A1 (ru) | Тепловизионный дефектоскоп | |
| JPS62203332A (ja) | 半導体ウエハの熱処理装置 | |
| JPS58135636A (ja) | 半導体ウエハ−熱処理装置 | |
| JPH0817752A (ja) | 半導体製造装置 | |
| JP2001304968A (ja) | 加熱物体の温度測定方法および装置 |