JPS62180067U - - Google Patents

Info

Publication number
JPS62180067U
JPS62180067U JP6678386U JP6678386U JPS62180067U JP S62180067 U JPS62180067 U JP S62180067U JP 6678386 U JP6678386 U JP 6678386U JP 6678386 U JP6678386 U JP 6678386U JP S62180067 U JPS62180067 U JP S62180067U
Authority
JP
Japan
Prior art keywords
plasma
light
formation spaces
comparing
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6678386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6678386U priority Critical patent/JPS62180067U/ja
Publication of JPS62180067U publication Critical patent/JPS62180067U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6678386U 1986-04-30 1986-04-30 Pending JPS62180067U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6678386U JPS62180067U (enExample) 1986-04-30 1986-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6678386U JPS62180067U (enExample) 1986-04-30 1986-04-30

Publications (1)

Publication Number Publication Date
JPS62180067U true JPS62180067U (enExample) 1987-11-16

Family

ID=30905097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6678386U Pending JPS62180067U (enExample) 1986-04-30 1986-04-30

Country Status (1)

Country Link
JP (1) JPS62180067U (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591673A (ja) * 1982-06-25 1984-01-07 Toshiba Corp 薄膜形成装置
JPS60182446A (ja) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd アモルフアス半導体膜の形成方法及びその装置
JPS61117432A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd プラズマモニタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591673A (ja) * 1982-06-25 1984-01-07 Toshiba Corp 薄膜形成装置
JPS60182446A (ja) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd アモルフアス半導体膜の形成方法及びその装置
JPS61117432A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd プラズマモニタ

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