JPS62180067U - - Google Patents
Info
- Publication number
- JPS62180067U JPS62180067U JP6678386U JP6678386U JPS62180067U JP S62180067 U JPS62180067 U JP S62180067U JP 6678386 U JP6678386 U JP 6678386U JP 6678386 U JP6678386 U JP 6678386U JP S62180067 U JPS62180067 U JP S62180067U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- light
- formation spaces
- comparing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6678386U JPS62180067U (enExample) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6678386U JPS62180067U (enExample) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180067U true JPS62180067U (enExample) | 1987-11-16 |
Family
ID=30905097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6678386U Pending JPS62180067U (enExample) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180067U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS591673A (ja) * | 1982-06-25 | 1984-01-07 | Toshiba Corp | 薄膜形成装置 |
| JPS60182446A (ja) * | 1984-02-29 | 1985-09-18 | Konishiroku Photo Ind Co Ltd | アモルフアス半導体膜の形成方法及びその装置 |
| JPS61117432A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | プラズマモニタ |
-
1986
- 1986-04-30 JP JP6678386U patent/JPS62180067U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS591673A (ja) * | 1982-06-25 | 1984-01-07 | Toshiba Corp | 薄膜形成装置 |
| JPS60182446A (ja) * | 1984-02-29 | 1985-09-18 | Konishiroku Photo Ind Co Ltd | アモルフアス半導体膜の形成方法及びその装置 |
| JPS61117432A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | プラズマモニタ |
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