JPS6217373B2 - - Google Patents

Info

Publication number
JPS6217373B2
JPS6217373B2 JP53017299A JP1729978A JPS6217373B2 JP S6217373 B2 JPS6217373 B2 JP S6217373B2 JP 53017299 A JP53017299 A JP 53017299A JP 1729978 A JP1729978 A JP 1729978A JP S6217373 B2 JPS6217373 B2 JP S6217373B2
Authority
JP
Japan
Prior art keywords
photoresist
pattern
film
semiconductor substrate
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53017299A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54109775A (en
Inventor
Hiroshi Kuroda
Hideaki Shimoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1729978A priority Critical patent/JPS54109775A/ja
Publication of JPS54109775A publication Critical patent/JPS54109775A/ja
Publication of JPS6217373B2 publication Critical patent/JPS6217373B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP1729978A 1978-02-16 1978-02-16 Manufacture of semiconductor device Granted JPS54109775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1729978A JPS54109775A (en) 1978-02-16 1978-02-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1729978A JPS54109775A (en) 1978-02-16 1978-02-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54109775A JPS54109775A (en) 1979-08-28
JPS6217373B2 true JPS6217373B2 (https=) 1987-04-17

Family

ID=11940116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1729978A Granted JPS54109775A (en) 1978-02-16 1978-02-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54109775A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140735A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体装置の製造方法
US6177337B1 (en) 1998-01-06 2001-01-23 International Business Machines Corporation Method of reducing metal voids in semiconductor device interconnection

Also Published As

Publication number Publication date
JPS54109775A (en) 1979-08-28

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