JPS62173733A - 高速信号測定装置 - Google Patents

高速信号測定装置

Info

Publication number
JPS62173733A
JPS62173733A JP61014796A JP1479686A JPS62173733A JP S62173733 A JPS62173733 A JP S62173733A JP 61014796 A JP61014796 A JP 61014796A JP 1479686 A JP1479686 A JP 1479686A JP S62173733 A JPS62173733 A JP S62173733A
Authority
JP
Japan
Prior art keywords
microstrip
conductor
power supply
probe needle
film carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61014796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260229B2 (en:Method
Inventor
Takehisa Hayashi
剛久 林
Hironori Tanaka
田中　広紀
Toshio Doi
俊雄 土井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61014796A priority Critical patent/JPS62173733A/ja
Publication of JPS62173733A publication Critical patent/JPS62173733A/ja
Publication of JPH0260229B2 publication Critical patent/JPH0260229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP61014796A 1986-01-28 1986-01-28 高速信号測定装置 Granted JPS62173733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014796A JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014796A JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Publications (2)

Publication Number Publication Date
JPS62173733A true JPS62173733A (ja) 1987-07-30
JPH0260229B2 JPH0260229B2 (en:Method) 1990-12-14

Family

ID=11871015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014796A Granted JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Country Status (1)

Country Link
JP (1) JPS62173733A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01288772A (ja) * 1988-05-17 1989-11-21 Tokyo Electron Ltd プローブガード
JPH04233480A (ja) * 1990-09-14 1992-08-21 Internatl Business Mach Corp <Ibm> 電子デバイスの試験装置
US5412329A (en) * 1991-11-18 1995-05-02 Tokyo Electron Yamanashi Limited Probe card

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01288772A (ja) * 1988-05-17 1989-11-21 Tokyo Electron Ltd プローブガード
JPH04233480A (ja) * 1990-09-14 1992-08-21 Internatl Business Mach Corp <Ibm> 電子デバイスの試験装置
US5412329A (en) * 1991-11-18 1995-05-02 Tokyo Electron Yamanashi Limited Probe card

Also Published As

Publication number Publication date
JPH0260229B2 (en:Method) 1990-12-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term