JPS62170762U - - Google Patents
Info
- Publication number
- JPS62170762U JPS62170762U JP5685286U JP5685286U JPS62170762U JP S62170762 U JPS62170762 U JP S62170762U JP 5685286 U JP5685286 U JP 5685286U JP 5685286 U JP5685286 U JP 5685286U JP S62170762 U JPS62170762 U JP S62170762U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- plasma etching
- glassy carbon
- parallel plate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001020 plasma etching Methods 0.000 claims description 3
- 229910021397 glassy carbon Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の平行平板形プラズマエツチ
ング用電極板を示した外観傾視図、第２図は平行
平板形プラズマエツチング装置を示した概略断面
図である。 １……槽、２……排気口、３……ガス導入口、
４……高周波電源、５，５′……電極板、６……
半導体ウエハ、７……通気性多孔質のガラス状カ
ーボン電極板。
ング用電極板を示した外観傾視図、第２図は平行
平板形プラズマエツチング装置を示した概略断面
図である。 １……槽、２……排気口、３……ガス導入口、
４……高周波電源、５，５′……電極板、６……
半導体ウエハ、７……通気性多孔質のガラス状カ
ーボン電極板。
Claims (1)
- 通気性多孔質のガラス状カーボンからなる構造
の平行平板形プラズマエツチング用電極板。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5685286U JPS6336047Y2 (ja) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5685286U JPS6336047Y2 (ja) | 1986-04-17 | 1986-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170762U true JPS62170762U (ja) | 1987-10-29 |
| JPS6336047Y2 JPS6336047Y2 (ja) | 1988-09-26 |
Family
ID=30886035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5685286U Expired JPS6336047Y2 (ja) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336047Y2 (ja) |
-
1986
- 1986-04-17 JP JP5685286U patent/JPS6336047Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6336047Y2 (ja) | 1988-09-26 |