JPS6350127U - - Google Patents
Info
- Publication number
- JPS6350127U JPS6350127U JP14269186U JP14269186U JPS6350127U JP S6350127 U JPS6350127 U JP S6350127U JP 14269186 U JP14269186 U JP 14269186U JP 14269186 U JP14269186 U JP 14269186U JP S6350127 U JPS6350127 U JP S6350127U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- supplying
- supply system
- processing chamber
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案装置の一実施例の構成図、第
２図は第１図のＡ部詳細図である。 １……真空処理室、２……上部電極、３……下
部電極、４……被処理物、５〜８……反応ガス、
９……ガス供給管、１０……真空排気ユニツト、
１１……ガス排気管、１２……高周波電源、１３
……スタテイツクミキサー。
２図は第１図のＡ部詳細図である。 １……真空処理室、２……上部電極、３……下
部電極、４……被処理物、５〜８……反応ガス、
９……ガス供給管、１０……真空排気ユニツト、
１１……ガス排気管、１２……高周波電源、１３
……スタテイツクミキサー。
Claims (1)
- 真空処理室内に複数の反応ガスを供給し、プラ
ズマ放電下で被処理物の処理を行なう装置におい
て、反応ガス供給系内に、スタテイツクミキサー
を設けたことを特徴とする半導体製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269186U JPS6350127U (ja) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269186U JPS6350127U (ja) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350127U true JPS6350127U (ja) | 1988-04-05 |
Family
ID=31051657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14269186U Pending JPS6350127U (ja) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350127U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0410335U (ja) * | 1990-05-18 | 1992-01-29 |
-
1986
- 1986-09-19 JP JP14269186U patent/JPS6350127U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0410335U (ja) * | 1990-05-18 | 1992-01-29 |