JPS62169489A - 熱伝導性絶縁基板 - Google Patents

熱伝導性絶縁基板

Info

Publication number
JPS62169489A
JPS62169489A JP1164786A JP1164786A JPS62169489A JP S62169489 A JPS62169489 A JP S62169489A JP 1164786 A JP1164786 A JP 1164786A JP 1164786 A JP1164786 A JP 1164786A JP S62169489 A JPS62169489 A JP S62169489A
Authority
JP
Japan
Prior art keywords
substrate
insulating layer
thermal conductivity
crystalline silicon
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1164786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035074B2 (https=
Inventor
善久 太和田
憲治 山本
中山　威久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP1164786A priority Critical patent/JPS62169489A/ja
Priority to EP19860115233 priority patent/EP0221531A3/en
Priority to EP94112466A priority patent/EP0635871A2/en
Priority to US06/927,211 priority patent/US4783368A/en
Publication of JPS62169489A publication Critical patent/JPS62169489A/ja
Publication of JPH035074B2 publication Critical patent/JPH035074B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Insulating Bodies (AREA)
JP1164786A 1985-11-06 1986-01-22 熱伝導性絶縁基板 Granted JPS62169489A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1164786A JPS62169489A (ja) 1986-01-22 1986-01-22 熱伝導性絶縁基板
EP19860115233 EP0221531A3 (en) 1985-11-06 1986-11-04 High heat conductive insulated substrate and method of manufacturing the same
EP94112466A EP0635871A2 (en) 1985-11-06 1986-11-04 High heat conductive insulated substrate and method of manufacturing the same
US06/927,211 US4783368A (en) 1985-11-06 1986-11-05 High heat conductive insulated substrate and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1164786A JPS62169489A (ja) 1986-01-22 1986-01-22 熱伝導性絶縁基板

Publications (2)

Publication Number Publication Date
JPS62169489A true JPS62169489A (ja) 1987-07-25
JPH035074B2 JPH035074B2 (https=) 1991-01-24

Family

ID=11783742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1164786A Granted JPS62169489A (ja) 1985-11-06 1986-01-22 熱伝導性絶縁基板

Country Status (1)

Country Link
JP (1) JPS62169489A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008502816A (ja) * 2004-06-15 2008-01-31 シーメンス パワー ジェネレーション インコーポレイテッド ナノフィラーのダイヤモンドライクコーティング

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172355A (ja) * 1985-01-25 1986-08-04 Matsushita Electric Works Ltd 高熱伝導性絶縁基板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172355A (ja) * 1985-01-25 1986-08-04 Matsushita Electric Works Ltd 高熱伝導性絶縁基板

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008502816A (ja) * 2004-06-15 2008-01-31 シーメンス パワー ジェネレーション インコーポレイテッド ナノフィラーのダイヤモンドライクコーティング
US8313832B2 (en) 2004-06-15 2012-11-20 Siemens Energy, Inc. Insulation paper with high thermal conductivity materials

Also Published As

Publication number Publication date
JPH035074B2 (https=) 1991-01-24

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