JPS62169353U - - Google Patents
Info
- Publication number
- JPS62169353U JPS62169353U JP5743886U JP5743886U JPS62169353U JP S62169353 U JPS62169353 U JP S62169353U JP 5743886 U JP5743886 U JP 5743886U JP 5743886 U JP5743886 U JP 5743886U JP S62169353 U JPS62169353 U JP S62169353U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tilting
- regions
- hereinafter referred
- focus adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Variable Magnification In Projection-Type Copying Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5743886U JPS62169353U (enExample) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5743886U JPS62169353U (enExample) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169353U true JPS62169353U (enExample) | 1987-10-27 |
Family
ID=30887138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5743886U Pending JPS62169353U (enExample) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169353U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01169900A (ja) * | 1987-12-25 | 1989-07-05 | Japan Atom Energy Res Inst | アーキング検出回路 |
| JPH01170022A (ja) * | 1987-12-25 | 1989-07-05 | Nikon Corp | 露光方法及び基板の姿勢制御方法 |
| JPH01292206A (ja) * | 1988-05-19 | 1989-11-24 | Nikon Corp | 物体の表面状態測定装置及び表面の高さ測定装置 |
-
1986
- 1986-04-18 JP JP5743886U patent/JPS62169353U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01169900A (ja) * | 1987-12-25 | 1989-07-05 | Japan Atom Energy Res Inst | アーキング検出回路 |
| JPH01170022A (ja) * | 1987-12-25 | 1989-07-05 | Nikon Corp | 露光方法及び基板の姿勢制御方法 |
| JPH01292206A (ja) * | 1988-05-19 | 1989-11-24 | Nikon Corp | 物体の表面状態測定装置及び表面の高さ測定装置 |
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