JPS62163930U - - Google Patents
Info
- Publication number
- JPS62163930U JPS62163930U JP5315186U JP5315186U JPS62163930U JP S62163930 U JPS62163930 U JP S62163930U JP 5315186 U JP5315186 U JP 5315186U JP 5315186 U JP5315186 U JP 5315186U JP S62163930 U JPS62163930 U JP S62163930U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- reaction tube
- clevis
- boat
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Description
第１図は本考案装置の一実施例の、ボート搬入
状態を示した斜視図、第２図は同じくボート搬送
途中の状態を示した側面図、第３図は同じくキヤ
ツプのクレビスをクレビスキヤツプで閉じた状態
を示した要部の側面図、第４図はその正面図であ
る。
１……反応管、２ａ……回動軸、３……キヤツ
プ、３ａ……クレビス、４……搬送ロツド、５…
…クレビスキヤツプ、６……ボート、７……ウエ
ーハ。
Fig. 1 is a perspective view of one embodiment of the device of the present invention, showing the state in which the boat is being carried in, Fig. 2 is a side view showing the same state in the middle of transporting the boat, and Fig. 3 is the same in which the clevis of the cap is connected with the clevis cap. FIG. 4 is a side view of the main parts showing the closed state, and FIG. 4 is a front view thereof. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2a... Rotating shaft, 3... Cap, 3a... Clevis, 4... Transfer rod, 5...
...clevis cap, 6...boat, 7...wafer.
Claims (1)
キヤツプ３を備えた反応管１内にその出入口より
ウエーハ７を載置したボート６を搬送ロツド４に
より搬入し、搬入したボート６をこの搬送ロツド
４により反応管１外に搬出するようにした半導体
製造装置において、上記搬送ロツド４に、ボート
６の搬入後に上記キヤツプ３のクレビス３ａを遮
蔽するクレビスキヤツプ５を載置せしめてなる半
導体製造装置。 A boat 6 with wafers 7 placed thereon is carried into the reaction tube 1 equipped with a cap 3 which rotates about a rotation axis 2a to open and close the entrance and exit port, using a transfer rod 4. In a semiconductor manufacturing apparatus in which the reaction tube 1 is transported out of the reaction tube 1 by a transport rod 4, a clevis cap 5 is placed on the transport rod 4 to cover the clevis 3a of the cap 3 after the boat 6 is transported. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315186U JPS62163930U (en) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315186U JPS62163930U (en) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163930U true JPS62163930U (en) | 1987-10-17 |
Family
ID=30878948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5315186U Pending JPS62163930U (en) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163930U (en) |
-
1986
- 1986-04-08 JP JP5315186U patent/JPS62163930U/ja active Pending