JPS63172131U - - Google Patents
Info
- Publication number
- JPS63172131U JPS63172131U JP6604787U JP6604787U JPS63172131U JP S63172131 U JPS63172131 U JP S63172131U JP 6604787 U JP6604787 U JP 6604787U JP 6604787 U JP6604787 U JP 6604787U JP S63172131 U JPS63172131 U JP S63172131U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer arm
- spin chuck
- wafer carrier
- takes out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Coating Apparatus (AREA)
Description
第１図ａは本考案の第１の実施例における平面
図、ｂは同正面図、第２図ａ，ｃ，ｅは本考案の
実施例における動作を示す平面図、第２図ｂ，ｄ
，ｆは同側面図、第３図ａは本考案の第２の実施
例を示す平面図、ｂは同側面図、第４図ａは従来
の塗布装置を示す平面図、ｂは同側面図である。
１……ウエーハキヤリア、２……キヤリアステ
ージ、３……ウエーハ、４……押し付けピストン
、５……搬送アーム、６……真空吸着部、７……
センタリングガイドストツパー、８……搬送アー
ム平行移動用シリンダー、９……搬送アーム上下
用シリンダー、１０……搬送アーム回転用モータ
ー、１１……スピンチヤツク。
Figure 1 a is a plan view of the first embodiment of the present invention, b is a front view of the same, Figures 2 a, c, and e are plan views showing the operation of the embodiment of the present invention, Figures 2 b, d
, f is a side view of the same, FIG. 3a is a plan view showing the second embodiment of the present invention, b is a side view of the same, FIG. 4a is a plan view showing a conventional coating device, and b is a side view of the same. It is. 1...Wafer carrier, 2...Carrier stage, 3...Wafer, 4...Press piston, 5...Transport arm, 6...Vacuum suction unit, 7...
Centering guide stopper, 8... Cylinder for parallel movement of the transfer arm, 9... Cylinder for moving the transfer arm up and down, 10... Motor for rotating the transfer arm, 11... Spin chuck.
Claims (1)
れをスピンチヤツクに移し替えてスピンチヤツク
上のウエーハにフオトレジスト等を回転塗布する
塗布装置において、前記ウエーハキヤリアからウ
エーハを取り出す搬送アームに、前記スピンチヤ
ツクに対するウエーハのセンタリングを行うセン
タリングガイドストツパーとウエーハを吸着保持
する真空吸着部とを設け、さらに前記ウエーハキ
ヤリア内のウエーハを前記搬送アームのセンタリ
ングガイドストツパーに押し付けるピストンと、
前記搬送アームをウエーハキヤリアとスピンチヤ
ツクとの間に往復動させる搬送アーム移送機構と
を装備したことを特徴とする塗布装置。 In a coating device that takes out a wafer from a wafer carrier, transfers it to a spin chuck, and spins coats a photoresist or the like onto the wafer on the spin chuck, a centering ring that centers the wafer with respect to the spin chuck is attached to a transfer arm that takes out the wafer from the wafer carrier. a piston that is provided with a guide stopper and a vacuum suction unit that sucks and holds the wafer, and further presses the wafer in the wafer carrier against the centering guide stopper of the transfer arm;
A coating apparatus characterized in that it is equipped with a transfer arm transfer mechanism that reciprocates the transfer arm between a wafer carrier and a spin chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6604787U JPS63172131U (en) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6604787U JPS63172131U (en) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172131U true JPS63172131U (en) | 1988-11-09 |
Family
ID=30903684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6604787U Pending JPS63172131U (en) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172131U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (en) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | Wafer transfer device |
| JPH07273171A (en) * | 1994-03-30 | 1995-10-20 | Tokyo Koku Keiki Kk | Handling apparatus for disc-like object |
| JP2003075121A (en) * | 2001-09-07 | 2003-03-12 | Toshiba Ceramics Co Ltd | Shape measuring device of square glass plate |
-
1987
- 1987-04-30 JP JP6604787U patent/JPS63172131U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292196A (en) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | Wafer transfer device |
| JPH07273171A (en) * | 1994-03-30 | 1995-10-20 | Tokyo Koku Keiki Kk | Handling apparatus for disc-like object |
| JP2003075121A (en) * | 2001-09-07 | 2003-03-12 | Toshiba Ceramics Co Ltd | Shape measuring device of square glass plate |
| JP4627938B2 (en) * | 2001-09-07 | 2011-02-09 | コバレントマテリアル株式会社 | Square glass plate shape measuring device |