JPS62156838A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62156838A
JPS62156838A JP60298860A JP29886085A JPS62156838A JP S62156838 A JPS62156838 A JP S62156838A JP 60298860 A JP60298860 A JP 60298860A JP 29886085 A JP29886085 A JP 29886085A JP S62156838 A JPS62156838 A JP S62156838A
Authority
JP
Japan
Prior art keywords
metal film
active layer
type active
film wiring
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60298860A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562823B2 (cg-RX-API-DMAC7.html
Inventor
Fumikoto Hisamori
久森　文詞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP60298860A priority Critical patent/JPS62156838A/ja
Publication of JPS62156838A publication Critical patent/JPS62156838A/ja
Publication of JPH0562823B2 publication Critical patent/JPH0562823B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP60298860A 1985-12-27 1985-12-27 半導体装置の製造方法 Granted JPS62156838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60298860A JPS62156838A (ja) 1985-12-27 1985-12-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60298860A JPS62156838A (ja) 1985-12-27 1985-12-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62156838A true JPS62156838A (ja) 1987-07-11
JPH0562823B2 JPH0562823B2 (cg-RX-API-DMAC7.html) 1993-09-09

Family

ID=17865127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60298860A Granted JPS62156838A (ja) 1985-12-27 1985-12-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62156838A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0562823B2 (cg-RX-API-DMAC7.html) 1993-09-09

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