JPS62155531A - 半導体ウエハの移替え装置 - Google Patents

半導体ウエハの移替え装置

Info

Publication number
JPS62155531A
JPS62155531A JP29623685A JP29623685A JPS62155531A JP S62155531 A JPS62155531 A JP S62155531A JP 29623685 A JP29623685 A JP 29623685A JP 29623685 A JP29623685 A JP 29623685A JP S62155531 A JPS62155531 A JP S62155531A
Authority
JP
Japan
Prior art keywords
wafer
support member
groove
semiconductor wafer
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29623685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334213B2 (enExample
Inventor
Norimichi Mitomi
三富　至道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP29623685A priority Critical patent/JPS62155531A/ja
Publication of JPS62155531A publication Critical patent/JPS62155531A/ja
Publication of JPH0334213B2 publication Critical patent/JPH0334213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP29623685A 1985-12-27 1985-12-27 半導体ウエハの移替え装置 Granted JPS62155531A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29623685A JPS62155531A (ja) 1985-12-27 1985-12-27 半導体ウエハの移替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29623685A JPS62155531A (ja) 1985-12-27 1985-12-27 半導体ウエハの移替え装置

Publications (2)

Publication Number Publication Date
JPS62155531A true JPS62155531A (ja) 1987-07-10
JPH0334213B2 JPH0334213B2 (enExample) 1991-05-21

Family

ID=17830940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29623685A Granted JPS62155531A (ja) 1985-12-27 1985-12-27 半導体ウエハの移替え装置

Country Status (1)

Country Link
JP (1) JPS62155531A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479425U (enExample) * 1990-11-26 1992-07-10
US6467827B1 (en) * 1999-10-30 2002-10-22 Frank J. Ardezzone IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479425U (enExample) * 1990-11-26 1992-07-10
US6467827B1 (en) * 1999-10-30 2002-10-22 Frank J. Ardezzone IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors

Also Published As

Publication number Publication date
JPH0334213B2 (enExample) 1991-05-21

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