JPS62152433U - - Google Patents
Info
- Publication number
- JPS62152433U JPS62152433U JP4018586U JP4018586U JPS62152433U JP S62152433 U JPS62152433 U JP S62152433U JP 4018586 U JP4018586 U JP 4018586U JP 4018586 U JP4018586 U JP 4018586U JP S62152433 U JPS62152433 U JP S62152433U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- unevenness
- detection means
- exposure apparatus
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
Landscapes
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4018586U JPS62152433U (zh) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4018586U JPS62152433U (zh) | 1986-03-19 | 1986-03-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62152433U true JPS62152433U (zh) | 1987-09-28 |
Family
ID=30854044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4018586U Pending JPS62152433U (zh) | 1986-03-19 | 1986-03-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62152433U (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5425863A (en) * | 1977-07-29 | 1979-02-27 | Koden Electronics Co Ltd | Detector with color indication |
JPS57117238A (en) * | 1981-01-14 | 1982-07-21 | Nippon Kogaku Kk <Nikon> | Exposing and baking device for manufacturing integrated circuit with illuminometer |
JPS57141923A (en) * | 1981-02-27 | 1982-09-02 | Hitachi Ltd | Projection type exposure device |
JPS60168026A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 投影露光装置 |
-
1986
- 1986-03-19 JP JP4018586U patent/JPS62152433U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5425863A (en) * | 1977-07-29 | 1979-02-27 | Koden Electronics Co Ltd | Detector with color indication |
JPS57117238A (en) * | 1981-01-14 | 1982-07-21 | Nippon Kogaku Kk <Nikon> | Exposing and baking device for manufacturing integrated circuit with illuminometer |
JPS57141923A (en) * | 1981-02-27 | 1982-09-02 | Hitachi Ltd | Projection type exposure device |
JPS60168026A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 投影露光装置 |
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