JPS6214694Y2 - - Google Patents

Info

Publication number
JPS6214694Y2
JPS6214694Y2 JP1982164576U JP16457682U JPS6214694Y2 JP S6214694 Y2 JPS6214694 Y2 JP S6214694Y2 JP 1982164576 U JP1982164576 U JP 1982164576U JP 16457682 U JP16457682 U JP 16457682U JP S6214694 Y2 JPS6214694 Y2 JP S6214694Y2
Authority
JP
Japan
Prior art keywords
hook
basket
wide
wafer basket
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982164576U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5970340U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982164576U priority Critical patent/JPS5970340U/ja
Publication of JPS5970340U publication Critical patent/JPS5970340U/ja
Application granted granted Critical
Publication of JPS6214694Y2 publication Critical patent/JPS6214694Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
JP1982164576U 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具 Granted JPS5970340U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982164576U JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982164576U JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Publications (2)

Publication Number Publication Date
JPS5970340U JPS5970340U (ja) 1984-05-12
JPS6214694Y2 true JPS6214694Y2 (enExample) 1987-04-15

Family

ID=30360777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982164576U Granted JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Country Status (1)

Country Link
JP (1) JPS5970340U (enExample)

Also Published As

Publication number Publication date
JPS5970340U (ja) 1984-05-12

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