JPS6214692Y2 - - Google Patents

Info

Publication number
JPS6214692Y2
JPS6214692Y2 JP1982034901U JP3490182U JPS6214692Y2 JP S6214692 Y2 JPS6214692 Y2 JP S6214692Y2 JP 1982034901 U JP1982034901 U JP 1982034901U JP 3490182 U JP3490182 U JP 3490182U JP S6214692 Y2 JPS6214692 Y2 JP S6214692Y2
Authority
JP
Japan
Prior art keywords
wafer
feed
center line
drive pin
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982034901U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58138339U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3490182U priority Critical patent/JPS58138339U/ja
Publication of JPS58138339U publication Critical patent/JPS58138339U/ja
Application granted granted Critical
Publication of JPS6214692Y2 publication Critical patent/JPS6214692Y2/ja
Granted legal-status Critical Current

Links

JP3490182U 1982-03-12 1982-03-12 ウエハ−の位置決め装置 Granted JPS58138339U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3490182U JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3490182U JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Publications (2)

Publication Number Publication Date
JPS58138339U JPS58138339U (ja) 1983-09-17
JPS6214692Y2 true JPS6214692Y2 (enrdf_load_stackoverflow) 1987-04-15

Family

ID=30046394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3490182U Granted JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Country Status (1)

Country Link
JP (1) JPS58138339U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392667A (en) * 1977-01-25 1978-08-14 Tokyo Seimitsu Co Ltd Device for positioning wafer

Also Published As

Publication number Publication date
JPS58138339U (ja) 1983-09-17

Similar Documents

Publication Publication Date Title
US4441853A (en) Disc orienting device
JPS6214692Y2 (enrdf_load_stackoverflow)
JPH0334216B2 (enrdf_load_stackoverflow)
JPH0528772Y2 (enrdf_load_stackoverflow)
JPS59228720A (ja) 整合装置
JPH09181151A (ja) 基板位置合わせ装置
JP2803702B2 (ja) ウエハ姿勢制御装置
JP3542815B2 (ja) ウェハーノッチ部の鏡面研磨装置およびその鏡面研磨方法
JP3631352B2 (ja) 卵自動割りの切削深さ自動調整方法
JP2002273689A (ja) シート切断装置
JPS6057641A (ja) 半導体ウエハ用フアセツトアライナ
JPS5932502Y2 (ja) 回転テ−ブル
JPS61201438A (ja) プリアライメントロ−ラ駆動装置
CN220731482U (zh) 晶圆平边对齐装置
JPH0212067Y2 (enrdf_load_stackoverflow)
JPS60130830A (ja) 成膜装置
KR19980022663U (ko) 웨이퍼 정렬장치
JP3478682B2 (ja) ノッチ付きウェーハ整列装置
JPS6254449A (ja) ウエハ整列装置
JPS61214445A (ja) ウエ−ハの位置合わせ機構
JPS61201439A (ja) プリアライメント装置
JPH0541882Y2 (enrdf_load_stackoverflow)
JPH02121347A (ja) ウエハの位置決め装置
JPS6262537A (ja) 半導体製造装置のオリエンテ−シヨンフラツト位置決め装置
JPH0535929Y2 (enrdf_load_stackoverflow)