JPS62144399A - プリント基板のエッチング装置 - Google Patents
プリント基板のエッチング装置Info
- Publication number
- JPS62144399A JPS62144399A JP60285325A JP28532585A JPS62144399A JP S62144399 A JPS62144399 A JP S62144399A JP 60285325 A JP60285325 A JP 60285325A JP 28532585 A JP28532585 A JP 28532585A JP S62144399 A JPS62144399 A JP S62144399A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- line
- etching
- entrance
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000012806 monitoring device Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 33
- 238000012544 monitoring process Methods 0.000 description 10
- 230000002950 deficient Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000007257 malfunction Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 101100008046 Caenorhabditis elegans cut-2 gene Proteins 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Supply And Installment Of Electrical Components (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60285325A JPS62144399A (ja) | 1985-12-18 | 1985-12-18 | プリント基板のエッチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60285325A JPS62144399A (ja) | 1985-12-18 | 1985-12-18 | プリント基板のエッチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62144399A true JPS62144399A (ja) | 1987-06-27 |
| JPH0365919B2 JPH0365919B2 (cg-RX-API-DMAC10.html) | 1991-10-15 |
Family
ID=17690081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60285325A Granted JPS62144399A (ja) | 1985-12-18 | 1985-12-18 | プリント基板のエッチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144399A (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009076633A (ja) * | 2007-09-20 | 2009-04-09 | Yamaha Motor Co Ltd | 基板処理装置、表面実装機、印刷機、検査機、及び塗布機 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52152175A (en) * | 1976-06-14 | 1977-12-17 | Hitachi Ltd | Capacity control device in feeding apparatus |
| JPS61165915U (cg-RX-API-DMAC10.html) * | 1985-04-01 | 1986-10-15 |
-
1985
- 1985-12-18 JP JP60285325A patent/JPS62144399A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52152175A (en) * | 1976-06-14 | 1977-12-17 | Hitachi Ltd | Capacity control device in feeding apparatus |
| JPS61165915U (cg-RX-API-DMAC10.html) * | 1985-04-01 | 1986-10-15 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009076633A (ja) * | 2007-09-20 | 2009-04-09 | Yamaha Motor Co Ltd | 基板処理装置、表面実装機、印刷機、検査機、及び塗布機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0365919B2 (cg-RX-API-DMAC10.html) | 1991-10-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |