JPS62144006A - マルチスリツト光の発生方法 - Google Patents

マルチスリツト光の発生方法

Info

Publication number
JPS62144006A
JPS62144006A JP28476885A JP28476885A JPS62144006A JP S62144006 A JPS62144006 A JP S62144006A JP 28476885 A JP28476885 A JP 28476885A JP 28476885 A JP28476885 A JP 28476885A JP S62144006 A JPS62144006 A JP S62144006A
Authority
JP
Japan
Prior art keywords
light
slit
diffraction
cylindrical lens
slit light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28476885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339604B2 (enExample
Inventor
Tsugito Maruyama
次人 丸山
Keiji Kahara
花原　啓至
Shinji Kanda
真司 神田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP28476885A priority Critical patent/JPS62144006A/ja
Priority to EP86401056A priority patent/EP0212992B1/en
Priority to EP91100068A priority patent/EP0424359B1/en
Priority to DE3650479T priority patent/DE3650479T2/de
Priority to DE8686401056T priority patent/DE3683423D1/de
Priority to US06/864,846 priority patent/US4846576A/en
Publication of JPS62144006A publication Critical patent/JPS62144006A/ja
Publication of JPH0339604B2 publication Critical patent/JPH0339604B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Control Of Position Or Direction (AREA)
JP28476885A 1985-05-20 1985-12-18 マルチスリツト光の発生方法 Granted JPS62144006A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP28476885A JPS62144006A (ja) 1985-12-18 1985-12-18 マルチスリツト光の発生方法
EP86401056A EP0212992B1 (en) 1985-05-20 1986-05-20 Method for measuring a three-dimensional position of an object
EP91100068A EP0424359B1 (en) 1985-05-20 1986-05-20 Device for emitting multislit lights
DE3650479T DE3650479T2 (de) 1985-05-20 1986-05-20 Vorrichtung zur Aussendung von Lichtflächen
DE8686401056T DE3683423D1 (de) 1985-05-20 1986-05-20 Verfahren zum messen einer dreidimensionalen lage eines objektes.
US06/864,846 US4846576A (en) 1985-05-20 1986-05-20 Method for measuring a three-dimensional position of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28476885A JPS62144006A (ja) 1985-12-18 1985-12-18 マルチスリツト光の発生方法

Publications (2)

Publication Number Publication Date
JPS62144006A true JPS62144006A (ja) 1987-06-27
JPH0339604B2 JPH0339604B2 (enExample) 1991-06-14

Family

ID=17682758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28476885A Granted JPS62144006A (ja) 1985-05-20 1985-12-18 マルチスリツト光の発生方法

Country Status (1)

Country Link
JP (1) JPS62144006A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581563B2 (ja) * 2007-03-08 2014-09-03 株式会社日立製作所 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Also Published As

Publication number Publication date
JPH0339604B2 (enExample) 1991-06-14

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