JPS6211999B2 - - Google Patents

Info

Publication number
JPS6211999B2
JPS6211999B2 JP15304684A JP15304684A JPS6211999B2 JP S6211999 B2 JPS6211999 B2 JP S6211999B2 JP 15304684 A JP15304684 A JP 15304684A JP 15304684 A JP15304684 A JP 15304684A JP S6211999 B2 JPS6211999 B2 JP S6211999B2
Authority
JP
Japan
Prior art keywords
coil
elastic body
springs
displacement
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15304684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133885A (ja
Inventor
Fumiaki Akitani
Kazuo Asakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15304684A priority Critical patent/JPS6133885A/ja
Publication of JPS6133885A publication Critical patent/JPS6133885A/ja
Publication of JPS6211999B2 publication Critical patent/JPS6211999B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
  • Manipulator (AREA)
JP15304684A 1984-07-25 1984-07-25 支持装置 Granted JPS6133885A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15304684A JPS6133885A (ja) 1984-07-25 1984-07-25 支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15304684A JPS6133885A (ja) 1984-07-25 1984-07-25 支持装置

Publications (2)

Publication Number Publication Date
JPS6133885A JPS6133885A (ja) 1986-02-17
JPS6211999B2 true JPS6211999B2 (enrdf_load_stackoverflow) 1987-03-16

Family

ID=15553786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15304684A Granted JPS6133885A (ja) 1984-07-25 1984-07-25 支持装置

Country Status (1)

Country Link
JP (1) JPS6133885A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2518671Y2 (ja) * 1991-06-13 1996-11-27 住友重機械工業株式会社 冷却機用ガスサイクル機関
JP4983585B2 (ja) * 2007-12-14 2012-07-25 株式会社島津製作所 試験機および試験機による試験方法
JP6173061B2 (ja) * 2013-06-20 2017-08-02 アズビル株式会社 コンプライアンス装置
JP6302305B2 (ja) * 2014-03-18 2018-03-28 キヤノン株式会社 振動低減装置、リソグラフィ装置、および物品の製造方法

Also Published As

Publication number Publication date
JPS6133885A (ja) 1986-02-17

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