JPS62112315A - Ｓｏｉ基板形成方法 - Google Patents

Ｓｏｉ基板形成方法

Info

Publication number
JPS62112315A
JPS62112315A JP25307185A JP25307185A JPS62112315A JP S62112315 A JPS62112315 A JP S62112315A JP 25307185 A JP25307185 A JP 25307185A JP 25307185 A JP25307185 A JP 25307185A JP S62112315 A JPS62112315 A JP S62112315A
Authority
JP
Japan
Prior art keywords
region
semiconductor film
film
semiconductor
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25307185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0380336B2 (enrdf_load_stackoverflow
Inventor
Kenichi Koyama
健一 小山
Takemitsu Kunio
國尾　武光
Tadayoshi Enomoto
榎本　忠儀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP25307185A priority Critical patent/JPS62112315A/ja
Publication of JPS62112315A publication Critical patent/JPS62112315A/ja
Publication of JPH0380336B2 publication Critical patent/JPH0380336B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP25307185A 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法 Granted JPS62112315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25307185A JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25307185A JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Publications (2)

Publication Number Publication Date
JPS62112315A true JPS62112315A (ja) 1987-05-23
JPH0380336B2 JPH0380336B2 (enrdf_load_stackoverflow) 1991-12-24

Family

ID=17246085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25307185A Granted JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Country Status (1)

Country Link
JP (1) JPS62112315A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0380336B2 (enrdf_load_stackoverflow) 1991-12-24

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