JPS6211138A - 異物検査装置 - Google Patents

異物検査装置

Info

Publication number
JPS6211138A
JPS6211138A JP14014785A JP14014785A JPS6211138A JP S6211138 A JPS6211138 A JP S6211138A JP 14014785 A JP14014785 A JP 14014785A JP 14014785 A JP14014785 A JP 14014785A JP S6211138 A JPS6211138 A JP S6211138A
Authority
JP
Japan
Prior art keywords
polarized
foreign matter
scanning
inspected
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14014785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Ryoji Nemoto
亮二 根本
Toshiaki Taniuchi
谷内　俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP14014785A priority Critical patent/JPS6211138A/ja
Publication of JPS6211138A publication Critical patent/JPS6211138A/ja
Publication of JPH0514857B2 publication Critical patent/JPH0514857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14014785A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14014785A JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14014785A JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211138A true JPS6211138A (ja) 1987-01-20
JPH0514857B2 JPH0514857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-26

Family

ID=15261963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14014785A Granted JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211138A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137789A (ja) * 2010-01-04 2011-07-14 Hioki Ee Corp 測光装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS5599049A (en) * 1979-01-24 1980-07-28 Toshiba Corp Defect detector
JPS57163852A (en) * 1981-03-31 1982-10-08 Matsushita Electric Works Ltd Detector for sample surface defect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS5599049A (en) * 1979-01-24 1980-07-28 Toshiba Corp Defect detector
JPS57163852A (en) * 1981-03-31 1982-10-08 Matsushita Electric Works Ltd Detector for sample surface defect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137789A (ja) * 2010-01-04 2011-07-14 Hioki Ee Corp 測光装置

Also Published As

Publication number Publication date
JPH0514857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-26

Similar Documents

Publication Publication Date Title
US4898471A (en) Particle detection on patterned wafers and the like
US5076692A (en) Particle detection on a patterned or bare wafer surface
KR970003760A (ko) 이물검사방법 및 장치
US5610719A (en) Displacement detection system
JPH0820371B2 (ja) 欠陥検査装置及び欠陥検査方法
JPH07209202A (ja) 表面状態検査装置、該表面状態検査装置を備える露光装置及び該露光装置を用いてデバイスを製造する方法
JPS58120155A (ja) レチクル異物検出装置
JPH0159522B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2008196872A (ja) 検査装置及び検査方法、パターン基板の製造方法
JPS61260211A (ja) 自動異物検出方法及びその装置
JPS6211138A (ja) 異物検査装置
JPH0256626B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61288143A (ja) 表面検査装置
JPS6240656B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0769272B2 (ja) 異物検査装置
JP2641552B2 (ja) 物体の位置検出装置およびロボット制御システム
JPS6211144A (ja) 異物検査装置
JPH0523620B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04244910A (ja) 高さ検出装置
JP2577920B2 (ja) 異物有無検査装置
JPH04339245A (ja) 表面状態検査装置
JPH04182085A (ja) レーザーマーキング装置
JPS62188334A (ja) 検査装置
WO2022201910A1 (ja) 異物検査装置及び異物検査方法
JPH054026B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)