JPS62110247A - 電子プロ−ブ装置の高精度位置決め方法及び装置 - Google Patents

電子プロ−ブ装置の高精度位置決め方法及び装置

Info

Publication number
JPS62110247A
JPS62110247A JP60249689A JP24968985A JPS62110247A JP S62110247 A JPS62110247 A JP S62110247A JP 60249689 A JP60249689 A JP 60249689A JP 24968985 A JP24968985 A JP 24968985A JP S62110247 A JPS62110247 A JP S62110247A
Authority
JP
Japan
Prior art keywords
image
point
electronic probe
scanning
precision positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60249689A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328016B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Katsumi Ura
裏　克己
Hiroshi Fujioka
弘 藤岡
Koji Nakamae
中前　幸治
Susumu Takashima
進 高嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Osaka University NUC
Original Assignee
Jeol Ltd
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Osaka University NUC filed Critical Jeol Ltd
Priority to JP60249689A priority Critical patent/JPS62110247A/ja
Publication of JPS62110247A publication Critical patent/JPS62110247A/ja
Publication of JPH0328016B2 publication Critical patent/JPH0328016B2/ja
Granted legal-status Critical Current

Links

JP60249689A 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置 Granted JPS62110247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60249689A JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60249689A JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Publications (2)

Publication Number Publication Date
JPS62110247A true JPS62110247A (ja) 1987-05-21
JPH0328016B2 JPH0328016B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-17

Family

ID=17196737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60249689A Granted JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Country Status (1)

Country Link
JP (1) JPS62110247A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001069643A1 (fr) * 2000-03-13 2001-09-20 Hitachi, Ltd. Dispositif de balayage a faisceau de particules chargees

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918554A (ja) * 1982-07-22 1984-01-30 Toshiba Corp 走査型電子顕微鏡の電子ビ−ム位置決め制御装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918554A (ja) * 1982-07-22 1984-01-30 Toshiba Corp 走査型電子顕微鏡の電子ビ−ム位置決め制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001069643A1 (fr) * 2000-03-13 2001-09-20 Hitachi, Ltd. Dispositif de balayage a faisceau de particules chargees

Also Published As

Publication number Publication date
JPH0328016B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-17

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