JPS62101018A - 半導体製造装置用シユラウドの製造方法 - Google Patents
半導体製造装置用シユラウドの製造方法Info
- Publication number
- JPS62101018A JPS62101018A JP24229585A JP24229585A JPS62101018A JP S62101018 A JPS62101018 A JP S62101018A JP 24229585 A JP24229585 A JP 24229585A JP 24229585 A JP24229585 A JP 24229585A JP S62101018 A JPS62101018 A JP S62101018A
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- film
- aluminum
- cylinder
- ceramic particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24229585A JPS62101018A (ja) | 1985-10-28 | 1985-10-28 | 半導体製造装置用シユラウドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24229585A JPS62101018A (ja) | 1985-10-28 | 1985-10-28 | 半導体製造装置用シユラウドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62101018A true JPS62101018A (ja) | 1987-05-11 |
| JPH022282B2 JPH022282B2 (enExample) | 1990-01-17 |
Family
ID=17087109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24229585A Granted JPS62101018A (ja) | 1985-10-28 | 1985-10-28 | 半導体製造装置用シユラウドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101018A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8316987B2 (en) | 2008-03-04 | 2012-11-27 | Tokyo Roki Co., Ltd. | Muffling structure of vent pipe and muffling structure of case |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101583981B1 (ko) * | 2014-09-04 | 2016-01-11 | (주)지오투정보기술 | 고속이동차량 기반 wlan 신호 수집 장치 및 방법 |
-
1985
- 1985-10-28 JP JP24229585A patent/JPS62101018A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8316987B2 (en) | 2008-03-04 | 2012-11-27 | Tokyo Roki Co., Ltd. | Muffling structure of vent pipe and muffling structure of case |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022282B2 (enExample) | 1990-01-17 |
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