JPH021859Y2 - - Google Patents

Info

Publication number
JPH021859Y2
JPH021859Y2 JP1985158390U JP15839085U JPH021859Y2 JP H021859 Y2 JPH021859 Y2 JP H021859Y2 JP 1985158390 U JP1985158390 U JP 1985158390U JP 15839085 U JP15839085 U JP 15839085U JP H021859 Y2 JPH021859 Y2 JP H021859Y2
Authority
JP
Japan
Prior art keywords
shroud
aluminum
stainless steel
cooling fluid
steel plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985158390U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265828U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985158390U priority Critical patent/JPH021859Y2/ja
Publication of JPS6265828U publication Critical patent/JPS6265828U/ja
Application granted granted Critical
Publication of JPH021859Y2 publication Critical patent/JPH021859Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985158390U 1985-10-15 1985-10-15 Expired JPH021859Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985158390U JPH021859Y2 (enExample) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985158390U JPH021859Y2 (enExample) 1985-10-15 1985-10-15

Publications (2)

Publication Number Publication Date
JPS6265828U JPS6265828U (enExample) 1987-04-23
JPH021859Y2 true JPH021859Y2 (enExample) 1990-01-17

Family

ID=31081832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985158390U Expired JPH021859Y2 (enExample) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPH021859Y2 (enExample)

Also Published As

Publication number Publication date
JPS6265828U (enExample) 1987-04-23

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