JPS619772A - スルホ−ル検査装置 - Google Patents

スルホ−ル検査装置

Info

Publication number
JPS619772A
JPS619772A JP59131716A JP13171684A JPS619772A JP S619772 A JPS619772 A JP S619772A JP 59131716 A JP59131716 A JP 59131716A JP 13171684 A JP13171684 A JP 13171684A JP S619772 A JPS619772 A JP S619772A
Authority
JP
Japan
Prior art keywords
hole
light
pattern
signal
light leakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59131716A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0263185B2 (enrdf_load_stackoverflow
Inventor
Kikuo Mita
三田　喜久夫
Moritoshi Ando
護俊 安藤
Giichi Kakigi
柿木　義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59131716A priority Critical patent/JPS619772A/ja
Publication of JPS619772A publication Critical patent/JPS619772A/ja
Publication of JPH0263185B2 publication Critical patent/JPH0263185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP59131716A 1984-06-25 1984-06-25 スルホ−ル検査装置 Granted JPS619772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59131716A JPS619772A (ja) 1984-06-25 1984-06-25 スルホ−ル検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59131716A JPS619772A (ja) 1984-06-25 1984-06-25 スルホ−ル検査装置

Publications (2)

Publication Number Publication Date
JPS619772A true JPS619772A (ja) 1986-01-17
JPH0263185B2 JPH0263185B2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=15064528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59131716A Granted JPS619772A (ja) 1984-06-25 1984-06-25 スルホ−ル検査装置

Country Status (1)

Country Link
JP (1) JPS619772A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0263185B2 (enrdf_load_stackoverflow) 1990-12-27

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