JPS6196544U - - Google Patents

Info

Publication number
JPS6196544U
JPS6196544U JP18162184U JP18162184U JPS6196544U JP S6196544 U JPS6196544 U JP S6196544U JP 18162184 U JP18162184 U JP 18162184U JP 18162184 U JP18162184 U JP 18162184U JP S6196544 U JPS6196544 U JP S6196544U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer prober
prober
cassette
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18162184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18162184U priority Critical patent/JPS6196544U/ja
Publication of JPS6196544U publication Critical patent/JPS6196544U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18162184U 1984-11-30 1984-11-30 Pending JPS6196544U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18162184U JPS6196544U (enExample) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18162184U JPS6196544U (enExample) 1984-11-30 1984-11-30

Publications (1)

Publication Number Publication Date
JPS6196544U true JPS6196544U (enExample) 1986-06-21

Family

ID=30739164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18162184U Pending JPS6196544U (enExample) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPS6196544U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54125978A (en) * 1978-03-24 1979-09-29 Toshiba Corp Drying device of photo resist film
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54125978A (en) * 1978-03-24 1979-09-29 Toshiba Corp Drying device of photo resist film
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置

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