JPS6188135A - 半導体バイオセンサの製造方法 - Google Patents

半導体バイオセンサの製造方法

Info

Publication number
JPS6188135A
JPS6188135A JP59209165A JP20916584A JPS6188135A JP S6188135 A JPS6188135 A JP S6188135A JP 59209165 A JP59209165 A JP 59209165A JP 20916584 A JP20916584 A JP 20916584A JP S6188135 A JPS6188135 A JP S6188135A
Authority
JP
Japan
Prior art keywords
enzyme
photoresist
semiconductor
film
semiconductor field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59209165A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548418B2 (enrdf_load_stackoverflow
Inventor
Toshihide Kuriyama
敏秀 栗山
Jun Kimura
純 木村
Yoshie Kawana
川名　美江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59209165A priority Critical patent/JPS6188135A/ja
Publication of JPS6188135A publication Critical patent/JPS6188135A/ja
Publication of JPH0548418B2 publication Critical patent/JPH0548418B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/001—Enzyme electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Wood Science & Technology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Zoology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Genetics & Genomics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP59209165A 1984-10-05 1984-10-05 半導体バイオセンサの製造方法 Granted JPS6188135A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59209165A JPS6188135A (ja) 1984-10-05 1984-10-05 半導体バイオセンサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59209165A JPS6188135A (ja) 1984-10-05 1984-10-05 半導体バイオセンサの製造方法

Publications (2)

Publication Number Publication Date
JPS6188135A true JPS6188135A (ja) 1986-05-06
JPH0548418B2 JPH0548418B2 (enrdf_load_stackoverflow) 1993-07-21

Family

ID=16568400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59209165A Granted JPS6188135A (ja) 1984-10-05 1984-10-05 半導体バイオセンサの製造方法

Country Status (1)

Country Link
JP (1) JPS6188135A (enrdf_load_stackoverflow)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02168153A (ja) * 1988-12-22 1990-06-28 Nec Corp 固定化酵素膜の形成方法
JPH04173841A (ja) * 1990-11-05 1992-06-22 Nec Corp 機能性基を有する高分子膜の部分的形成方法
JPH06242068A (ja) * 1993-02-18 1994-09-02 Nec Corp グルコースセンサの製造方法
US5465133A (en) * 1988-10-04 1995-11-07 Asahi Kogaku Kogyo Kabushiki Kaisha Still video camera
US6537310B1 (en) 1999-11-19 2003-03-25 Advanced Bio Prosthetic Surfaces, Ltd. Endoluminal implantable devices and method of making same
KR100473361B1 (ko) * 2001-10-17 2005-03-08 주식회사 디지탈바이오테크놀러지 마이크로 칩 및 그 제조 방법
US6936066B2 (en) 1999-11-19 2005-08-30 Advanced Bio Prosthetic Surfaces, Ltd. Complaint implantable medical devices and methods of making same
US7300457B2 (en) 1999-11-19 2007-11-27 Advanced Bio Prosthetic Surfaces, Ltd. Self-supporting metallic implantable grafts, compliant implantable medical devices and methods of making same
JP2011512804A (ja) * 2008-02-29 2011-04-28 アイメック 細胞酵素ベースのバイオセンサ
US8372139B2 (en) 2001-02-14 2013-02-12 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
US10172730B2 (en) 1999-11-19 2019-01-08 Vactronix Scientific, Llc Stents with metallic covers and methods of making same
US10292849B2 (en) 1999-11-19 2019-05-21 Vactronix Scientific, Llc Balloon catheter having metal balloon and method of making same
US10465274B2 (en) 2002-09-26 2019-11-05 Vactronix Scientific, Llc Implantable graft and methods of making same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59209166A (ja) * 1984-04-13 1984-11-27 Matsushita Electric Ind Co Ltd 印字装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59209166A (ja) * 1984-04-13 1984-11-27 Matsushita Electric Ind Co Ltd 印字装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5465133A (en) * 1988-10-04 1995-11-07 Asahi Kogaku Kogyo Kabushiki Kaisha Still video camera
JPH02168153A (ja) * 1988-12-22 1990-06-28 Nec Corp 固定化酵素膜の形成方法
JPH04173841A (ja) * 1990-11-05 1992-06-22 Nec Corp 機能性基を有する高分子膜の部分的形成方法
JPH06242068A (ja) * 1993-02-18 1994-09-02 Nec Corp グルコースセンサの製造方法
US6936066B2 (en) 1999-11-19 2005-08-30 Advanced Bio Prosthetic Surfaces, Ltd. Complaint implantable medical devices and methods of making same
US6537310B1 (en) 1999-11-19 2003-03-25 Advanced Bio Prosthetic Surfaces, Ltd. Endoluminal implantable devices and method of making same
US7300457B2 (en) 1999-11-19 2007-11-27 Advanced Bio Prosthetic Surfaces, Ltd. Self-supporting metallic implantable grafts, compliant implantable medical devices and methods of making same
US10172730B2 (en) 1999-11-19 2019-01-08 Vactronix Scientific, Llc Stents with metallic covers and methods of making same
US10292849B2 (en) 1999-11-19 2019-05-21 Vactronix Scientific, Llc Balloon catheter having metal balloon and method of making same
US8372139B2 (en) 2001-02-14 2013-02-12 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
US9433515B2 (en) 2001-02-14 2016-09-06 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
US10660528B2 (en) 2001-02-14 2020-05-26 Vactronix Scientific, Llc Method of using an in vivo sensor having differential material properties
KR100473361B1 (ko) * 2001-10-17 2005-03-08 주식회사 디지탈바이오테크놀러지 마이크로 칩 및 그 제조 방법
US10465274B2 (en) 2002-09-26 2019-11-05 Vactronix Scientific, Llc Implantable graft and methods of making same
JP2011512804A (ja) * 2008-02-29 2011-04-28 アイメック 細胞酵素ベースのバイオセンサ

Also Published As

Publication number Publication date
JPH0548418B2 (enrdf_load_stackoverflow) 1993-07-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term