JPS618649A - 光学測定装置 - Google Patents

光学測定装置

Info

Publication number
JPS618649A
JPS618649A JP13061684A JP13061684A JPS618649A JP S618649 A JPS618649 A JP S618649A JP 13061684 A JP13061684 A JP 13061684A JP 13061684 A JP13061684 A JP 13061684A JP S618649 A JPS618649 A JP S618649A
Authority
JP
Japan
Prior art keywords
sample
light
photoluminescence
emitted
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13061684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158454B2 (enExample
Inventor
Michio Tajima
道夫 田島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13061684A priority Critical patent/JPS618649A/ja
Publication of JPS618649A publication Critical patent/JPS618649A/ja
Publication of JPH0158454B2 publication Critical patent/JPH0158454B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP13061684A 1984-06-25 1984-06-25 光学測定装置 Granted JPS618649A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13061684A JPS618649A (ja) 1984-06-25 1984-06-25 光学測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13061684A JPS618649A (ja) 1984-06-25 1984-06-25 光学測定装置

Publications (2)

Publication Number Publication Date
JPS618649A true JPS618649A (ja) 1986-01-16
JPH0158454B2 JPH0158454B2 (enExample) 1989-12-12

Family

ID=15038478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13061684A Granted JPS618649A (ja) 1984-06-25 1984-06-25 光学測定装置

Country Status (1)

Country Link
JP (1) JPS618649A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202744A (en) * 1988-07-29 1993-04-13 Louis Thomas A Electro-optical measuring instruments

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788348A (en) * 1980-11-21 1982-06-02 Hitachi Ltd Method and device for spectral fluorescence

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788348A (en) * 1980-11-21 1982-06-02 Hitachi Ltd Method and device for spectral fluorescence

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202744A (en) * 1988-07-29 1993-04-13 Louis Thomas A Electro-optical measuring instruments

Also Published As

Publication number Publication date
JPH0158454B2 (enExample) 1989-12-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term