JPS6185152U - - Google Patents
Info
- Publication number
- JPS6185152U JPS6185152U JP17001384U JP17001384U JPS6185152U JP S6185152 U JPS6185152 U JP S6185152U JP 17001384 U JP17001384 U JP 17001384U JP 17001384 U JP17001384 U JP 17001384U JP S6185152 U JPS6185152 U JP S6185152U
- Authority
- JP
- Japan
- Prior art keywords
- wiring film
- semiconductor device
- opening
- substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図ａ，ｂはこの考案の一実施例を示す要部
平面図、そのＡ−Ａ′断面図、第２図ａ，ｂは従
来の半導体装置を示す平面図、そのＡ−Ａ′断面
図である。 １…シリコン基板、２…酸化膜、３…第１のア
ルミニウム配線膜、４…層間窒化膜、５…第２の
アルミニウム配線膜、５ａ…開口、６…ＣＶＤ酸
化膜。
平面図、そのＡ−Ａ′断面図、第２図ａ，ｂは従
来の半導体装置を示す平面図、そのＡ−Ａ′断面
図である。 １…シリコン基板、２…酸化膜、３…第１のア
ルミニウム配線膜、４…層間窒化膜、５…第２の
アルミニウム配線膜、５ａ…開口、６…ＣＶＤ酸
化膜。
Claims (1)
- 基板上に絶縁膜を介して配線膜を多層に形成し
てなる半導体装置において、前記配線膜に開口を
設けたことを特徴とする半導体装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17001384U JPS6185152U (ja) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17001384U JPS6185152U (ja) | 1984-11-07 | 1984-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185152U true JPS6185152U (ja) | 1986-06-04 |
Family
ID=30727722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17001384U Pending JPS6185152U (ja) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185152U (ja) |
-
1984
- 1984-11-07 JP JP17001384U patent/JPS6185152U/ja active Pending