JPS6184512A - 二層メツキ測定方法 - Google Patents
二層メツキ測定方法Info
- Publication number
- JPS6184512A JPS6184512A JP20757984A JP20757984A JPS6184512A JP S6184512 A JPS6184512 A JP S6184512A JP 20757984 A JP20757984 A JP 20757984A JP 20757984 A JP20757984 A JP 20757984A JP S6184512 A JPS6184512 A JP S6184512A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- thickness
- fluorescent
- plating
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims description 13
- 239000002184 metal Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 238000005259 measurement Methods 0.000 claims description 6
- 238000011088 calibration curve Methods 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000007796 conventional method Methods 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 2
- 239000010931 gold Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000003705 background correction Methods 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20757984A JPS6184512A (ja) | 1984-10-03 | 1984-10-03 | 二層メツキ測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20757984A JPS6184512A (ja) | 1984-10-03 | 1984-10-03 | 二層メツキ測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184512A true JPS6184512A (ja) | 1986-04-30 |
| JPH0371046B2 JPH0371046B2 (enrdf_load_stackoverflow) | 1991-11-11 |
Family
ID=16542090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20757984A Granted JPS6184512A (ja) | 1984-10-03 | 1984-10-03 | 二層メツキ測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184512A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100887065B1 (ko) | 2006-12-27 | 2009-03-04 | 주식회사 포스코 | 접합부 중첩량 측정장치 |
-
1984
- 1984-10-03 JP JP20757984A patent/JPS6184512A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100887065B1 (ko) | 2006-12-27 | 2009-03-04 | 주식회사 포스코 | 접합부 중첩량 측정장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0371046B2 (enrdf_load_stackoverflow) | 1991-11-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |