JPS6177707A - 半導体集積回路装置の方向判別装置 - Google Patents

半導体集積回路装置の方向判別装置

Info

Publication number
JPS6177707A
JPS6177707A JP20225284A JP20225284A JPS6177707A JP S6177707 A JPS6177707 A JP S6177707A JP 20225284 A JP20225284 A JP 20225284A JP 20225284 A JP20225284 A JP 20225284A JP S6177707 A JPS6177707 A JP S6177707A
Authority
JP
Japan
Prior art keywords
peaks
circuit
histogram
interval
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20225284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334802B2 (OSRAM
Inventor
Masahiro Nagao
長尾　正博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20225284A priority Critical patent/JPS6177707A/ja
Publication of JPS6177707A publication Critical patent/JPS6177707A/ja
Publication of JPH0334802B2 publication Critical patent/JPH0334802B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP20225284A 1984-09-25 1984-09-25 半導体集積回路装置の方向判別装置 Granted JPS6177707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20225284A JPS6177707A (ja) 1984-09-25 1984-09-25 半導体集積回路装置の方向判別装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20225284A JPS6177707A (ja) 1984-09-25 1984-09-25 半導体集積回路装置の方向判別装置

Publications (2)

Publication Number Publication Date
JPS6177707A true JPS6177707A (ja) 1986-04-21
JPH0334802B2 JPH0334802B2 (OSRAM) 1991-05-24

Family

ID=16454466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20225284A Granted JPS6177707A (ja) 1984-09-25 1984-09-25 半導体集積回路装置の方向判別装置

Country Status (1)

Country Link
JP (1) JPS6177707A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0321811A (ja) * 1989-05-31 1991-01-30 American Teleph & Telegr Co <Att> テキスト方位決定方法
JPH04236317A (ja) * 1991-01-21 1992-08-25 Nec Corp 表面実装ｉｃ極性検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0321811A (ja) * 1989-05-31 1991-01-30 American Teleph & Telegr Co <Att> テキスト方位決定方法
JPH04236317A (ja) * 1991-01-21 1992-08-25 Nec Corp 表面実装ｉｃ極性検査装置

Also Published As

Publication number Publication date
JPH0334802B2 (OSRAM) 1991-05-24

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