JPS6177707A - Direction judging device of semiconductor integrated circuit device - Google Patents

Abstract

PURPOSE:To obtain a noise-resisting-direction judging function characterized by a high speed, by projecting light on one end part of the upper surface of an IC package from slant upper parts of both sides, picking up the profile of a notch, obtaining the projection of a data pattern, performing statistical processing, and judging the presence of the notch. CONSTITUTION:A notch 21 is provided only at one end part of the upper surface of a package of a semiconductor integrated circuit device 2. An image sensor 3 picks up the image of the end part from the upper part of one end of the device 2, which is guided to a specified position by a guide 1. The end part to be picked up is lighted from the upper parts of both sides by a light source 4. The two-dimensional signal obtained by the image sensor 3 is digitalized 5 by an A/D converter 5. Each digitalized signal is binary-coded 6 by using a specified threshold value. The pattern of the binary-coded two-dimensional image signal is projected in the specified direction, and a histogram is obtained by a histogram forming circuit 7. Threshold processing of the histogram is performed by a peak position detector circuit 8, and the number of peaks and the central position of the peaks are obtained. A peak-interval detector circuit 9 obtains the interval when the number of the peaks is two. A direction judging circuit 10 judges that the device 2 is aligned in the specified direction when the obtained interval is within the specified range.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a semiconductor integrated circuit device (hereinafter referred to as rIcJ) 11? The present invention relates to a device for determining the direction of an IC that is fed by a guide or the like during the assembly and inspection process of an IC having a notch at one end of the top surface of the package.

[Conventional technology]

The IC manufacturing process is becoming increasingly automated9, and the number of ICs flowing
There is an assumption that the direction of the sensor will remain correct unless it is changed artificially, and that if Iruma performs a sample measurement on the way, he will always return it in the correct direction. No device was used to visually automatically check the orientation of the IC.

[Problem that the invention seeks to solve]

Conventionally, a function for determining the direction was not provided based on the above premise, but it is possible for a person to inadvertently return the IC to the line in the wrong direction after performing a sampling inspection midway. In actual assembly lines, ICs that are originally normal are often determined to be defective or destroyed.

The present invention was made in order to solve the above problems, and therefore, it is an object of the present invention to provide a device that can automatically determine the direction of an IC by recognizing a notch at one end of the top surface of an IC pancake. .

[Means for solving problems]

The IC identification device according to the present invention includes a d&image device that images one end of the top surface of the IC package, an N0 converter that digitizes the two-dimensional image f information obtained by this, and a A binarization circuit for converting into values, a histogram creation circuit for projecting this binarized video signal in one two-dimensional direction to obtain a histogram, and a direction determining circuit for determining the direction of the IC from the peak position interval of this histogram. It has been established.

[Effect]

In this invention, two-dimensional video information obtained by imaging one end of the top surface of an IC package with an imaging device is digitized using a ~0 converter, and then this is converted into a digital image using a binarization circuit. The binarized video signal obtained in this way is binarized in one direction, and the histogram is created by projecting it in one direction in two dimensions.The position of the peak and when there are two peaks, the interval of 7 is The direction of the IC is determined depending on whether or not it is within a predetermined range.

〔Example〕

FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention, in which (1) is a guide, (2) is an IC whose direction is to be determined and is sent along the guide (1), and (3) is an upward direction. From IC (
2) A solid-state camera, which is an imaging device, is fixed at a position where one end is viewed, and the direction of the scanning line matches the direction of the guide (1). (4) illuminates the top surface of the IC (, 2) from both sides. A pair of light sources; (5) is an A/l converter that digitizes the video signal from the solid-state camera (3) for each element of a two-dimensional matrix; A binarization circuit that binarizes the signal, (7) is 21 [! for one screen after binarization]. (8) is a histogram creation circuit that creates a histogram by projecting the converted video signal in the scanning line direction; (8) thresholds the obtained histogram and calculates the number and position of peaks exceeding the threshold l1M for each peak; (9) is a peak interval detection circuit that determines the interval when there are two peaks, and μQ is the peak position detection circuit that determines the interval between two peaks. This is a direction determining circuit that determines the direction of the IC depending on the case.

This device targets an IC (2) that has a notch at one end of the top surface of the package, as shown in a perspective view in Figure 2, and a notch as shown in an enlarged partial side view in Figure 3. When part (2) is irradiated with light source (4) from an oblique direction,
The specularly reflected light (a) at the end of the notch c2) is incident on the upper solid-state camera (3), and the specularly reflected light tb) from other parts is not incident thereon. Therefore, when the IC (2) is illuminated from both sides of the notch (B) as shown in Figure 1, the output of the solid-state camera (3) is A/D converted by the IV'D converter (5), and then The two-dimensional image after being binarized by the binarization circuit (6) becomes as shown in Figure 4, and the outline of the notch 12]) can be extracted.Q A histogram is created for this binary direct image. When the circuit (8) takes the projection of the solid-state camera (3) in the scanning line direction, it corresponds to the projection of the IC (2) in the longitudinal direction, and a projected figure as shown in FIG. 5 is obtained. This projected figure is subjected to threshold processing by a peak position detection circuit (8) to determine the number of peaks exceeding the threshold level T and the center position If of each peak.

In the example of Figure 5, the number of peaks is 2, and the peak position is xl.
and x2. Then, the peak interval detection circuit (9) calculates seven peak intervals only if there are 21 peaks.

In the example of FIG. 5, when the number of peaks of the 0-direction discrimination circuit determined by X2-Xi is two, and the interval is within a predetermined value range, in the example of FIG. The solid-state camera (3) observes I only if −X□≦P+α is satisfied.
It is determined that there is a notch 2'D at the end of C(2), and the direction determination result is output.0 However, P and α are constants.

〔Effect of the invention〕

As described above, in the direction determination device of the present invention, light is irradiated from diagonally upward on both sides at one end of the top surface of the IC package, the outline of the notch is imaged with the imaging device, the data pattern is projected, and the threshold 1 Since we adopted a method that determines whether or not a notch exists by performing statistical processing such as direct processing to find peaks, we can obtain a direction determination function that is fast and resistant to noise.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention.
Figure 2 is an external perspective view of the IC, Figure 3 is an enlarged partial side view showing the irradiation of light onto the IC and the imaging situation, Figure 4 is a diagram of the binarized two-dimensional image pattern obtained by the rfiZ value conversion circuit, Figure 5 shows an example of a projected figure (histogram). In the figure, (1) RI guide, (2) semiconductor integrated circuit device, (3) imaging device (solid-state camera), (4)
is a light source, (5) is an A70f converter, (6) is a binarization circuit,
(7) is a histogram creation circuit, (8) is a peak position detection circuit, (9) is a peak interval detection circuit, αQ is a direction discrimination circuit, and @ is a notch. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] (1) An imaging device that has a notch at only one end of the top surface of a package and images one end of a semiconductor integrated circuit device guided to a predetermined position by a guide from above; A light source that illuminates the end portion of the semiconductor integrated circuit device imaged by the device from diagonally above on both sides, and A/D conversion that digitizes the two-dimensional video signal obtained by the image pickup device for each element of the two-dimensional matrix. vessel, this A/D
A binarization circuit that binarizes each signal digitized by the converter using a predetermined threshold, and a histogram is obtained by projecting the binarized two-dimensional video signal pattern after the binarization in a predetermined direction. a histogram creation circuit; a peak position detection circuit that performs threshold processing on the histogram to determine the number of peaks and the center position of the peak; a peak interval detection circuit that determines the interval when there are two peaks; and the number of peaks. is 2
1. A direction determination device for a semiconductor integrated circuit device, comprising a direction determination circuit that determines that the semiconductor integrated circuit device is in a predetermined direction when the interval between the two is within a predetermined range.