JPS6175595A - Thick film multilayer board - Google Patents

Thick film multilayer board

Info

Publication number
JPS6175595A
JPS6175595A JP19670784A JP19670784A JPS6175595A JP S6175595 A JPS6175595 A JP S6175595A JP 19670784 A JP19670784 A JP 19670784A JP 19670784 A JP19670784 A JP 19670784A JP S6175595 A JPS6175595 A JP S6175595A
Authority
JP
Japan
Prior art keywords
layer
thick film
green sheet
film multilayer
multilayer board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19670784A
Other languages
Japanese (ja)
Inventor
伊藤 光子
戸崎 博已
久司 堂河内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP19670784A priority Critical patent/JPS6175595A/en
Publication of JPS6175595A publication Critical patent/JPS6175595A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の利用分野〕1(1 本発明は厚膜多層板に係り、特に反シのない。[Detailed description of the invention] [Field of application of the invention] 1 (1) The present invention relates to a thick film multilayer board, and is particularly free from defects.

厚膜多層板に関する。Regarding thick film multilayer boards.

〔発明の背景〕[Background of the invention]

通信機、電子計算機、家電品等に使用される。 Used in communication devices, computers, home appliances, etc.

回路基板は、ますます小型化、高密度化の傾向1゜にめ
る。
Circuit boards are becoming increasingly smaller and more densely packed.

このた゛め、高密度の微細多層配線が可能なガラスセラ
ミックス製のグリーンシートを印刷用基板に用いて、多
層回路を作成することが進め。
For this reason, the creation of multilayer circuits is progressing by using glass-ceramic green sheets, which are capable of high-density, fine multilayer wiring, as printing substrates.

られている。この基板上に導体、抵抗および絶、。It is being Conductors, resistors and wires, on this board.

絶層を施した厚膜多層板の構造を第1図に示す。゛これ
は、ガラスセラミックス製のグリーンシート1上に第一
層配線導体2と、こわに接続する第一層抵抗体3と、こ
れらを被接する絶縁層4と、第二層配線導体5と、これ
に接続する第二層□抵抗体6がそれぞれ印刷によって積
層され、この印刷積層体を従来の厚膜焼成ベルト炉によ
り例えは850°Cで焼結して製造していた。
Figure 1 shows the structure of a thick film multilayer board with insulation layers.゛This consists of a first layer wiring conductor 2, a first layer resistor 3 which is stiffly connected on a green sheet 1 made of glass ceramics, an insulating layer 4 which covers these, a second layer wiring conductor 5, A second layer □ resistor 6 connected thereto was laminated by printing, and the printed laminate was sintered at, for example, 850° C. in a conventional thick film firing belt furnace.

しかし、この配線板は焼結時基板が大きく反るため、基
板上の配線導体が断線し、各種部品1・゛が接続できな
かった。
However, with this wiring board, the board warped significantly during sintering, so the wiring conductors on the board broke, making it impossible to connect various parts 1.

これは、焼結工程に発生するグリーンシートの収縮量と
、このシートの印刷積層物の収縮量に差かを)るためで
ある。
This is because there is a difference between the amount of shrinkage of the green sheet that occurs during the sintering process and the amount of shrinkage of the printed laminate of this sheet.

グリーンシートのガラスセラミックスと、絶1、線層の
ガラスセラミックスとは全く同じでおるにもかかわらず
上記のように反りが発生するのは、グリーンシートと印
刷絶縁層のガラス粉体の充填度の差によるものと考えら
れる。この時配線月別の形成の有無には大きな差t3r
みられなかった〔窯業協会、昭和58年年会講演予稿集
、低温焼結多層セラミック配線基板(58,5,16)
〕。
Although the glass-ceramics of the green sheet and the glass-ceramics of the line layer are exactly the same, the reason why the warpage occurs as described above is due to the degree of filling of the glass powder in the green sheet and the printed insulating layer. This is thought to be due to the difference. At this time, there is a large difference t3r in the presence or absence of wiring formation depending on the month.
Not found [Ceramics Association, 1981 Annual Meeting Lecture Proceedings, Low Temperature Sintered Multilayer Ceramic Wiring Board (58, 5, 16)
].

〔発明の目的〕[Purpose of the invention]

本発明の目的は、上記した従来技術の欠点を除き、反り
のない多層回路板を提供することに・ある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art described above and provide a warp-free multilayer circuit board.

〔発明の概要〕[Summary of the invention]

本発明は、多層配線板の表裏面に、同じガラスセラミッ
クペーストを用いて同じ層数の絶縁層を形成することに
よシ、焼結工程で発生する。
The present invention is produced in a sintering process by forming the same number of insulating layers using the same glass ceramic paste on the front and back surfaces of a multilayer wiring board.

基板反りを防止することを特徴とするものである。It is characterized by preventing substrate warpage.

即ち、グリーンシートをその両面から絶縁層ではさむこ
とによシ、基板となるグリーンシートの一方向への反シ
の発生を抑えようとするも、。
That is, by sandwiching the green sheet between insulating layers on both sides, it is attempted to suppress the occurrence of warpage in one direction of the green sheet serving as a substrate.

のである。It is.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明を第2図を用いて詳細に説明する。 Hereinafter, the present invention will be explained in detail using FIG. 2.

ガラス粉末、フィラー、溶剤および可凰剤を混合、混練
したものを、通常のドクターブレー゛ドキャスティング
法で成型してガラスセラミック製のグリーンシート1と
した。このグリーンシート1−ヒにAf −pd系導体
ベーヌトを印刷、乾燥し、未焼成の第一層配線導体2を
形成し、−・これに接続するようにRtb Ot系抵抗
ペーヌトを・印刷、乾燥して未焼成の第一層抵抗体3と
した。
A glass ceramic green sheet 1 was obtained by mixing and kneading a glass powder, a filler, a solvent, and a sintering agent, and molding the mixture by a conventional doctor blade casting method. On this green sheet 1-1, print and dry Af-pd-based conductor beanute to form an unfired first layer wiring conductor 2, and print and dry Rtb-Ot-based resistor beanute to connect to this. Then, an unfired first layer resistor 3 was obtained.

これらを被覆する絶縁ペーストは、グリーンシート1と
同組成のガラス、フィラー配合材料を。
The insulating paste that covers these is a glass and filler compounded material with the same composition as Green Sheet 1.

ペースト化したものであり、これを印刷、乾燥[、)し
て絶縁層4とした。その上に第一層と同様の。
This was made into a paste, which was printed and dried to form the insulating layer 4. Similar to the first layer on top of it.

材料を用いて、第一層と同様に印刷、乾燥して第二層配
線導体5と第二層抵抗体6を形成した。
The materials were printed and dried in the same manner as the first layer to form a second layer wiring conductor 5 and a second layer resistor 6.

次いでこのグリーンシート1の反対側に、絶縁層4と同
じ絶縁ペーストを用いて印刷、乾燥し1゜て絶縁層7を
形成し、これを850°Cで10分焼結して多層配線板
を作成した。
Next, on the opposite side of this green sheet 1, the same insulating paste as the insulating layer 4 was printed and dried for 1° to form an insulating layer 7, and this was sintered at 850°C for 10 minutes to form a multilayer wiring board. Created.

このようにして作られた配線板は、焼結工程中に生じる
焼結収縮による反シの発生は無く、基板表jUへのIC
チップ、士ラミックチップコン、(1デンサ、および入
出力用リードの接続が完全に。
The wiring board made in this way does not have cracks due to sintering shrinkage that occurs during the sintering process, and the IC on the board surface is
Chip, RAMIC chip controller (1 capacitor, and input/output leads are fully connected.

行なわれた。It was done.

本実施例では、絶縁層が一層の二層回路を示。This example shows a two-layer circuit with one insulating layer.

したが、多層化された場合にはその絶縁層の層゛数分の
厚さとその裏面に形成することで同様の6効果が得られ
た。この時、裏面にも同様に回路”を形成しても本効果
は当然あられれる。
However, when the insulating layer is multilayered, the same six effects can be obtained by forming the insulating layer as thick as the number of layers and on the back surface thereof. At this time, the present effect can naturally be obtained even if a circuit is similarly formed on the back side.

〔発明の効果〕〔Effect of the invention〕

以上詳述した通り、本発明の多層配線板によ ・れば、
反多のない多層配線板が得られる。   1゜この結果
、配線導体の断線がなくなり、信頼。
As detailed above, according to the multilayer wiring board of the present invention,
A multilayer wiring board free of bulges can be obtained. 1゜As a result, there is no disconnection of the wiring conductor, making it reliable.

性の高い部品実装ができる。Highly accurate component mounting is possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来技術の厚膜多層配線板の断面図 。 第2図は本発明の配線板の一例を示す断面図で15ある
。 1・・・・・・・・・グリーンシート 2・・・・・・・・・第一層配線導体 3・・・・・・
・・・第一層抵抗体。 4・・・・・・・・・絶縁層      5・・・・・
・・・・第二層配線導体 。 毛?図
FIG. 1 is a sectional view of a conventional thick film multilayer wiring board. FIG. 2 is a sectional view 15 showing an example of the wiring board of the present invention. 1... Green sheet 2... First layer wiring conductor 3...
...First layer resistor. 4...Insulating layer 5...
...Second layer wiring conductor. hair? figure

Claims (1)

【特許請求の範囲】[Claims] ガラスセラミック製のグリーンシートと、このグリーン
シート表面上に設けられた回路よりなる厚膜多層板にお
いて、前記グリーンシートの両面に同質の絶縁層が設け
られていることを特徴とする厚膜多層板。
A thick film multilayer board comprising a glass ceramic green sheet and a circuit provided on the surface of the green sheet, characterized in that insulating layers of the same quality are provided on both sides of the green sheet. .
JP19670784A 1984-09-21 1984-09-21 Thick film multilayer board Pending JPS6175595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19670784A JPS6175595A (en) 1984-09-21 1984-09-21 Thick film multilayer board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19670784A JPS6175595A (en) 1984-09-21 1984-09-21 Thick film multilayer board

Publications (1)

Publication Number Publication Date
JPS6175595A true JPS6175595A (en) 1986-04-17

Family

ID=16362246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19670784A Pending JPS6175595A (en) 1984-09-21 1984-09-21 Thick film multilayer board

Country Status (1)

Country Link
JP (1) JPS6175595A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61196599A (en) * 1985-02-26 1986-08-30 日本特殊陶業株式会社 Crystalized glass multi-layer circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61196599A (en) * 1985-02-26 1986-08-30 日本特殊陶業株式会社 Crystalized glass multi-layer circuit board

Similar Documents

Publication Publication Date Title
JPH01282890A (en) Manufacture of multilayer circuit
JPH0632378B2 (en) Multi-layer ceramic board with built-in electronic components
JPS62265795A (en) Ceramic board with built-in capacitor
JP2955442B2 (en) Manufacturing method of ceramic circuit board
JPS6175595A (en) Thick film multilayer board
JPH08125339A (en) Manufacture of multilayer circuit board
JPH01298796A (en) Hybrid integrated circuit
JPS60117796A (en) Multilayer circuit board and method of producing same
JP3188086B2 (en) Ceramic wiring board, its manufacturing method and its mounting structure
JP2681328B2 (en) Circuit board manufacturing method
JPH10294561A (en) Highly de-bindered multilayered wiring board and its manufacture
JPS6239558B2 (en)
JPS63168904A (en) Copper paste composition for inner layer
JPS61230391A (en) Manufacture of multilayer circuit board
JPH04290492A (en) Manufacture of ceramic circuit board with low dielectric constant
JP2976088B2 (en) Surface mounting component having side electrode and method of manufacturing the same
JPS6323394A (en) Manufacture of composite sintered unit
JPS6259479B2 (en)
JPS6024095A (en) Method of producing glass ceramic multilayer circuit board
JPS60102763A (en) Multilayer thick film hybrid integrated circuit substrate
JPS60257195A (en) Hybrid substrate and method of producing same
JPH01222498A (en) Manufacture of multilayer ceramic wiring board
JPS6226200B2 (en)
JPS59111987A (en) Manufacture of composite sintered body
JPS60240180A (en) Multilayer circuit board