JPS6173880A - 真空蒸着メツキ方法及び真空蒸着メツキ装置 - Google Patents

真空蒸着メツキ方法及び真空蒸着メツキ装置

Info

Publication number
JPS6173880A
JPS6173880A JP59192574A JP19257484A JPS6173880A JP S6173880 A JPS6173880 A JP S6173880A JP 59192574 A JP59192574 A JP 59192574A JP 19257484 A JP19257484 A JP 19257484A JP S6173880 A JPS6173880 A JP S6173880A
Authority
JP
Japan
Prior art keywords
chamber
inert gas
pressure
vacuum
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59192574A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032232B2 (enrdf_load_stackoverflow
Inventor
Heizaburo Furukawa
古川　平三郎
Kanji Wake
和気　完治
Yoshio Shimozato
下里　省夫
Kenichi Yanagi
謙一 柳
Mitsuo Kato
光雄 加藤
Tetsuyoshi Wada
哲義 和田
Norio Tsukiji
築地　憲夫
Takuya Aiko
愛甲　琢哉
Toshiharu Kikko
橘高　敏晴
Koji Nakanishi
康二 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP59192574A priority Critical patent/JPS6173880A/ja
Priority to AU47373/85A priority patent/AU585531B2/en
Priority to US06/774,818 priority patent/US4676999A/en
Priority to KR1019850006764A priority patent/KR890004618B1/ko
Priority to DE8585730123T priority patent/DE3577997D1/de
Priority to CA000490764A priority patent/CA1239060A/en
Priority to EP85730123A priority patent/EP0175640B1/en
Publication of JPS6173880A publication Critical patent/JPS6173880A/ja
Priority to US06/855,793 priority patent/US4674443A/en
Publication of JPH032232B2 publication Critical patent/JPH032232B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/561—Continuous furnaces for strip or wire with a controlled atmosphere or vacuum
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/56—Continuous furnaces for strip or wire
    • C21D9/562—Details
    • C21D9/565—Sealing arrangements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
JP59192574A 1984-09-17 1984-09-17 真空蒸着メツキ方法及び真空蒸着メツキ装置 Granted JPS6173880A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP59192574A JPS6173880A (ja) 1984-09-17 1984-09-17 真空蒸着メツキ方法及び真空蒸着メツキ装置
AU47373/85A AU585531B2 (en) 1984-09-17 1985-09-11 Method and apparatus for vacuum deposition plating
US06/774,818 US4676999A (en) 1984-09-17 1985-09-11 Method for vacuum deposition plating steel strip
KR1019850006764A KR890004618B1 (ko) 1984-09-17 1985-09-16 진공증착도금방법 및 진공증착도금장치
DE8585730123T DE3577997D1 (de) 1984-09-17 1985-09-16 Verfahren und vorrichtung zum ueberziehen durch vakuumbeschichtung.
CA000490764A CA1239060A (en) 1984-09-17 1985-09-16 Method and apparatus for vacuum deposition plating
EP85730123A EP0175640B1 (en) 1984-09-17 1985-09-16 Method and apparatus for vacuum deposition plating
US06/855,793 US4674443A (en) 1984-09-17 1986-04-24 Method and apparatus for vacuum deposition plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59192574A JPS6173880A (ja) 1984-09-17 1984-09-17 真空蒸着メツキ方法及び真空蒸着メツキ装置

Publications (2)

Publication Number Publication Date
JPS6173880A true JPS6173880A (ja) 1986-04-16
JPH032232B2 JPH032232B2 (enrdf_load_stackoverflow) 1991-01-14

Family

ID=16293544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59192574A Granted JPS6173880A (ja) 1984-09-17 1984-09-17 真空蒸着メツキ方法及び真空蒸着メツキ装置

Country Status (1)

Country Link
JP (1) JPS6173880A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238275A (ja) * 1987-03-27 1988-10-04 Nisshin Steel Co Ltd 連続真空蒸着めつき装置の負圧防止方法
US20150013846A1 (en) * 2012-03-08 2015-01-15 Baoshan Iron & Steel Co., Ltd. Method for Producing Silicon Steel Normalizing Substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238275A (ja) * 1987-03-27 1988-10-04 Nisshin Steel Co Ltd 連続真空蒸着めつき装置の負圧防止方法
US20150013846A1 (en) * 2012-03-08 2015-01-15 Baoshan Iron & Steel Co., Ltd. Method for Producing Silicon Steel Normalizing Substrate
US9738946B2 (en) * 2012-03-08 2017-08-22 Baoshan Iron & Steel, Co., Ltd. Method for producing silicon steel normalizing substrate

Also Published As

Publication number Publication date
JPH032232B2 (enrdf_load_stackoverflow) 1991-01-14

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