JPH032232B2 - - Google Patents
Info
- Publication number
- JPH032232B2 JPH032232B2 JP19257484A JP19257484A JPH032232B2 JP H032232 B2 JPH032232 B2 JP H032232B2 JP 19257484 A JP19257484 A JP 19257484A JP 19257484 A JP19257484 A JP 19257484A JP H032232 B2 JPH032232 B2 JP H032232B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- inert gas
- vacuum
- pressure
- atmospheric pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 50
- 238000000137 annealing Methods 0.000 claims description 49
- 239000011261 inert gas Substances 0.000 claims description 41
- 238000007789 sealing Methods 0.000 claims description 35
- 238000007738 vacuum evaporation Methods 0.000 claims description 29
- 239000007789 gas Substances 0.000 claims description 26
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 238000001771 vacuum deposition Methods 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 238000000746 purification Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000003921 oil Substances 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 76
- 229910052757 nitrogen Inorganic materials 0.000 description 51
- 229910000831 Steel Inorganic materials 0.000 description 20
- 239000010959 steel Substances 0.000 description 20
- 238000006467 substitution reaction Methods 0.000 description 19
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 18
- 229910001873 dinitrogen Inorganic materials 0.000 description 10
- 238000010926 purge Methods 0.000 description 9
- 238000005452 bending Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000004880 explosion Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005246 galvanizing Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
- C21D9/561—Continuous furnaces for strip or wire with a controlled atmosphere or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
- C21D9/562—Details
- C21D9/565—Sealing arrangements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59192574A JPS6173880A (ja) | 1984-09-17 | 1984-09-17 | 真空蒸着メツキ方法及び真空蒸着メツキ装置 |
| US06/774,818 US4676999A (en) | 1984-09-17 | 1985-09-11 | Method for vacuum deposition plating steel strip |
| AU47373/85A AU585531B2 (en) | 1984-09-17 | 1985-09-11 | Method and apparatus for vacuum deposition plating |
| EP85730123A EP0175640B1 (en) | 1984-09-17 | 1985-09-16 | Method and apparatus for vacuum deposition plating |
| CA000490764A CA1239060A (en) | 1984-09-17 | 1985-09-16 | Method and apparatus for vacuum deposition plating |
| DE8585730123T DE3577997D1 (de) | 1984-09-17 | 1985-09-16 | Verfahren und vorrichtung zum ueberziehen durch vakuumbeschichtung. |
| KR1019850006764A KR890004618B1 (ko) | 1984-09-17 | 1985-09-16 | 진공증착도금방법 및 진공증착도금장치 |
| US06/855,793 US4674443A (en) | 1984-09-17 | 1986-04-24 | Method and apparatus for vacuum deposition plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59192574A JPS6173880A (ja) | 1984-09-17 | 1984-09-17 | 真空蒸着メツキ方法及び真空蒸着メツキ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173880A JPS6173880A (ja) | 1986-04-16 |
| JPH032232B2 true JPH032232B2 (enrdf_load_stackoverflow) | 1991-01-14 |
Family
ID=16293544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59192574A Granted JPS6173880A (ja) | 1984-09-17 | 1984-09-17 | 真空蒸着メツキ方法及び真空蒸着メツキ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173880A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63238275A (ja) * | 1987-03-27 | 1988-10-04 | Nisshin Steel Co Ltd | 連続真空蒸着めつき装置の負圧防止方法 |
| CN103305744B (zh) * | 2012-03-08 | 2016-03-30 | 宝山钢铁股份有限公司 | 一种高质量硅钢常化基板的生产方法 |
-
1984
- 1984-09-17 JP JP59192574A patent/JPS6173880A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6173880A (ja) | 1986-04-16 |
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