JPS6171955A - 研磨方法及びその装置 - Google Patents

研磨方法及びその装置

Info

Publication number
JPS6171955A
JPS6171955A JP59189762A JP18976284A JPS6171955A JP S6171955 A JPS6171955 A JP S6171955A JP 59189762 A JP59189762 A JP 59189762A JP 18976284 A JP18976284 A JP 18976284A JP S6171955 A JPS6171955 A JP S6171955A
Authority
JP
Japan
Prior art keywords
grindstone
workpiece
polishing
processing
pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59189762A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575548B2 (enrdf_load_stackoverflow
Inventor
Junji Nakada
順二 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59189762A priority Critical patent/JPS6171955A/ja
Publication of JPS6171955A publication Critical patent/JPS6171955A/ja
Publication of JPH0575548B2 publication Critical patent/JPH0575548B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP59189762A 1984-09-12 1984-09-12 研磨方法及びその装置 Granted JPS6171955A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59189762A JPS6171955A (ja) 1984-09-12 1984-09-12 研磨方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59189762A JPS6171955A (ja) 1984-09-12 1984-09-12 研磨方法及びその装置

Publications (2)

Publication Number Publication Date
JPS6171955A true JPS6171955A (ja) 1986-04-12
JPH0575548B2 JPH0575548B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=16246751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59189762A Granted JPS6171955A (ja) 1984-09-12 1984-09-12 研磨方法及びその装置

Country Status (1)

Country Link
JP (1) JPS6171955A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007319994A (ja) * 2006-06-01 2007-12-13 Disco Abrasive Syst Ltd 研磨パッド
JP2023003962A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003963A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003964A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003965A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491141A (enrdf_load_stackoverflow) * 1972-04-17 1974-01-08
JPS527199A (en) * 1975-04-15 1977-01-20 Hiromitsu Naka Slide type escape device
JPS52116995A (en) * 1976-03-27 1977-09-30 Toshiba Corp Lapping grinder
JPS5748462A (en) * 1980-09-01 1982-03-19 Nippon Telegr & Teleph Corp <Ntt> Grinding attachment for modifying automatically form
JPS6125760A (ja) * 1984-07-09 1986-02-04 Toshiba Corp 研磨方法及びその装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491141A (enrdf_load_stackoverflow) * 1972-04-17 1974-01-08
JPS527199A (en) * 1975-04-15 1977-01-20 Hiromitsu Naka Slide type escape device
JPS52116995A (en) * 1976-03-27 1977-09-30 Toshiba Corp Lapping grinder
JPS5748462A (en) * 1980-09-01 1982-03-19 Nippon Telegr & Teleph Corp <Ntt> Grinding attachment for modifying automatically form
JPS6125760A (ja) * 1984-07-09 1986-02-04 Toshiba Corp 研磨方法及びその装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007319994A (ja) * 2006-06-01 2007-12-13 Disco Abrasive Syst Ltd 研磨パッド
JP2023003962A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003963A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003964A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール
JP2023003965A (ja) * 2021-06-25 2023-01-17 株式会社ディスコ 研削ホイール

Also Published As

Publication number Publication date
JPH0575548B2 (enrdf_load_stackoverflow) 1993-10-20

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