JPS6168314A - 多孔性シリカ、アルミナ、チタニアおよびジルコニアの製造方法 - Google Patents
多孔性シリカ、アルミナ、チタニアおよびジルコニアの製造方法Info
- Publication number
- JPS6168314A JPS6168314A JP18861184A JP18861184A JPS6168314A JP S6168314 A JPS6168314 A JP S6168314A JP 18861184 A JP18861184 A JP 18861184A JP 18861184 A JP18861184 A JP 18861184A JP S6168314 A JPS6168314 A JP S6168314A
- Authority
- JP
- Japan
- Prior art keywords
- gel
- oxygen
- compounds
- polar
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 21
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 title claims abstract description 16
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims abstract description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 23
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 16
- 230000007062 hydrolysis Effects 0.000 claims abstract description 14
- 238000006460 hydrolysis reaction Methods 0.000 claims abstract description 14
- 238000004132 cross linking Methods 0.000 claims abstract description 12
- 150000004703 alkoxides Chemical class 0.000 claims abstract description 5
- JSPLKZUTYZBBKA-UHFFFAOYSA-N trioxidane Chemical compound OOO JSPLKZUTYZBBKA-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 33
- 150000001875 compounds Chemical class 0.000 claims description 30
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 21
- 239000010936 titanium Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000011148 porous material Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000002253 acid Substances 0.000 claims description 12
- 150000003755 zirconium compounds Chemical class 0.000 claims description 12
- 238000001879 gelation Methods 0.000 claims description 10
- 150000007513 acids Chemical class 0.000 claims description 8
- 239000012456 homogeneous solution Substances 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 150000001414 amino alcohols Chemical class 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 150000002902 organometallic compounds Chemical class 0.000 claims description 4
- 238000005280 amorphization Methods 0.000 claims description 2
- -1 carboxylic acid compounds Chemical class 0.000 claims description 2
- 150000002009 diols Chemical class 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 125000005594 diketone group Chemical group 0.000 claims 2
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 150000001991 dicarboxylic acids Chemical class 0.000 claims 1
- 229910052809 inorganic oxide Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 229910052726 zirconium Inorganic materials 0.000 abstract description 4
- 230000001131 transforming effect Effects 0.000 abstract 2
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 abstract 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- IVDFJHOHABJVEH-UHFFFAOYSA-N pinacol Chemical compound CC(C)(O)C(C)(C)O IVDFJHOHABJVEH-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical class [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 7
- 229910001928 zirconium oxide Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 3
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N methyl pentane Natural products CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 229940051250 hexylene glycol Drugs 0.000 description 2
- 229910000000 metal hydroxide Inorganic materials 0.000 description 2
- 150000004692 metal hydroxides Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000002747 voluntary effect Effects 0.000 description 2
- AFABGHUZZDYHJO-UHFFFAOYSA-N 2-Methylpentane Chemical compound CCCC(C)C AFABGHUZZDYHJO-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 101100128281 Enterobacteria phage T4 rIII gene Proteins 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229930194542 Keto Natural products 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920003086 cellulose ether Polymers 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000032050 esterification Effects 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- 238000006266 etherification reaction Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000006317 isomerization reaction Methods 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229960005235 piperonyl butoxide Drugs 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000012976 tarts Nutrition 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C01F7/34—Preparation of aluminium hydroxide by precipitation from solutions containing aluminium salts
- C01F7/36—Preparation of aluminium hydroxide by precipitation from solutions containing aluminium salts from organic aluminium salts
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Silicon Compounds (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18861184A JPS6168314A (ja) | 1984-09-07 | 1984-09-07 | 多孔性シリカ、アルミナ、チタニアおよびジルコニアの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18861184A JPS6168314A (ja) | 1984-09-07 | 1984-09-07 | 多孔性シリカ、アルミナ、チタニアおよびジルコニアの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6168314A true JPS6168314A (ja) | 1986-04-08 |
JPH0159965B2 JPH0159965B2 (enrdf_load_stackoverflow) | 1989-12-20 |
Family
ID=16226703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18861184A Granted JPS6168314A (ja) | 1984-09-07 | 1984-09-07 | 多孔性シリカ、アルミナ、チタニアおよびジルコニアの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6168314A (enrdf_load_stackoverflow) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6287242A (ja) * | 1985-05-29 | 1987-04-21 | Nippon Shokubai Kagaku Kogyo Co Ltd | 安定な金属酸化物系ゾル組成物 |
JPS63242917A (ja) * | 1987-03-27 | 1988-10-07 | Agency Of Ind Science & Technol | 耐熱性アルミナ複合酸化物の製造方法 |
JPH01108164A (ja) * | 1987-10-19 | 1989-04-25 | Toray Ind Inc | ジルコニア薄膜の形成方法 |
JPH01164723A (ja) * | 1987-12-22 | 1989-06-28 | Koroido Res:Kk | アルミナ前駆体ゲルの製造方法 |
JPH01230406A (ja) * | 1988-03-11 | 1989-09-13 | Koroido Res:Kk | 金属アルコキシドからの粘性ゾルの製造方法 |
JPH01246130A (ja) * | 1987-11-30 | 1989-10-02 | Rhone Poulenc Chim | 酸化チタン、酸化ジルコニウムまたは酸化セリウムを主体とする顆粒の製造方法及びそれより得られる顆粒 |
JPH01278414A (ja) * | 1988-05-02 | 1989-11-08 | Koroido Res:Kk | アルミナ前駆体ゾルの製造方法 |
JPH01286906A (ja) * | 1988-05-11 | 1989-11-17 | Murata Mfg Co Ltd | セラミックス用酸化物粉末の製造法 |
EP0365801A1 (en) * | 1988-09-06 | 1990-05-02 | Nissan Motor Co., Ltd. | Process for producing alumina with high specific surface area |
JPH03503045A (ja) * | 1988-03-03 | 1991-07-11 | アライド‐シグナル・インコーポレーテッド | 単分散チタニア球状体の製造法 |
JPH03199120A (ja) * | 1989-12-28 | 1991-08-30 | Koroido Res:Kk | アルミナ系多孔質ゲルの製造方法 |
WO1998045210A1 (en) * | 1997-04-09 | 1998-10-15 | Cabot Corporation | Process for producing metal oxide and organo-metal oxide compositions |
US6158245A (en) * | 1997-07-29 | 2000-12-12 | Physical Optics Corporation | High efficiency monolithic glass light shaping diffuser and method of making |
JP2002145614A (ja) * | 2000-11-08 | 2002-05-22 | Taki Chem Co Ltd | 酸化チタンゾル組成物 |
US6446467B1 (en) * | 1997-07-29 | 2002-09-10 | Physical Optics Corporation | Monolithic glass light shaping diffuser and method for its production |
KR101310883B1 (ko) * | 2006-03-29 | 2013-09-25 | 삼성에스디아이 주식회사 | 다공성 금속 산화물 및 그 제조방법 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59213602A (ja) * | 1983-05-13 | 1984-12-03 | Kanegafuchi Chem Ind Co Ltd | 複合材料用複合金属溶液 |
-
1984
- 1984-09-07 JP JP18861184A patent/JPS6168314A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59213602A (ja) * | 1983-05-13 | 1984-12-03 | Kanegafuchi Chem Ind Co Ltd | 複合材料用複合金属溶液 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6287242A (ja) * | 1985-05-29 | 1987-04-21 | Nippon Shokubai Kagaku Kogyo Co Ltd | 安定な金属酸化物系ゾル組成物 |
JPS63242917A (ja) * | 1987-03-27 | 1988-10-07 | Agency Of Ind Science & Technol | 耐熱性アルミナ複合酸化物の製造方法 |
JPH01108164A (ja) * | 1987-10-19 | 1989-04-25 | Toray Ind Inc | ジルコニア薄膜の形成方法 |
JPH01246130A (ja) * | 1987-11-30 | 1989-10-02 | Rhone Poulenc Chim | 酸化チタン、酸化ジルコニウムまたは酸化セリウムを主体とする顆粒の製造方法及びそれより得られる顆粒 |
JPH01164723A (ja) * | 1987-12-22 | 1989-06-28 | Koroido Res:Kk | アルミナ前駆体ゲルの製造方法 |
JPH03503045A (ja) * | 1988-03-03 | 1991-07-11 | アライド‐シグナル・インコーポレーテッド | 単分散チタニア球状体の製造法 |
JPH01230406A (ja) * | 1988-03-11 | 1989-09-13 | Koroido Res:Kk | 金属アルコキシドからの粘性ゾルの製造方法 |
JPH01278414A (ja) * | 1988-05-02 | 1989-11-08 | Koroido Res:Kk | アルミナ前駆体ゾルの製造方法 |
JPH01286906A (ja) * | 1988-05-11 | 1989-11-17 | Murata Mfg Co Ltd | セラミックス用酸化物粉末の製造法 |
EP0365801A1 (en) * | 1988-09-06 | 1990-05-02 | Nissan Motor Co., Ltd. | Process for producing alumina with high specific surface area |
JPH03199120A (ja) * | 1989-12-28 | 1991-08-30 | Koroido Res:Kk | アルミナ系多孔質ゲルの製造方法 |
WO1998045210A1 (en) * | 1997-04-09 | 1998-10-15 | Cabot Corporation | Process for producing metal oxide and organo-metal oxide compositions |
US6158245A (en) * | 1997-07-29 | 2000-12-12 | Physical Optics Corporation | High efficiency monolithic glass light shaping diffuser and method of making |
US6446467B1 (en) * | 1997-07-29 | 2002-09-10 | Physical Optics Corporation | Monolithic glass light shaping diffuser and method for its production |
JP2002145614A (ja) * | 2000-11-08 | 2002-05-22 | Taki Chem Co Ltd | 酸化チタンゾル組成物 |
KR101310883B1 (ko) * | 2006-03-29 | 2013-09-25 | 삼성에스디아이 주식회사 | 다공성 금속 산화물 및 그 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
JPH0159965B2 (enrdf_load_stackoverflow) | 1989-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |