JPS6164179A - 圧電装置 - Google Patents

圧電装置

Info

Publication number
JPS6164179A
JPS6164179A JP59187156A JP18715684A JPS6164179A JP S6164179 A JPS6164179 A JP S6164179A JP 59187156 A JP59187156 A JP 59187156A JP 18715684 A JP18715684 A JP 18715684A JP S6164179 A JPS6164179 A JP S6164179A
Authority
JP
Japan
Prior art keywords
film
piezoelectric
zinc oxide
insulation
crystal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59187156A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510837B2 (enExample
Inventor
Koji Nishiyama
浩司 西山
Takeshi Nakamura
武 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP59187156A priority Critical patent/JPS6164179A/ja
Publication of JPS6164179A publication Critical patent/JPS6164179A/ja
Publication of JPH0510837B2 publication Critical patent/JPH0510837B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP59187156A 1984-09-05 1984-09-05 圧電装置 Granted JPS6164179A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59187156A JPS6164179A (ja) 1984-09-05 1984-09-05 圧電装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59187156A JPS6164179A (ja) 1984-09-05 1984-09-05 圧電装置

Publications (2)

Publication Number Publication Date
JPS6164179A true JPS6164179A (ja) 1986-04-02
JPH0510837B2 JPH0510837B2 (enExample) 1993-02-10

Family

ID=16201101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59187156A Granted JPS6164179A (ja) 1984-09-05 1984-09-05 圧電装置

Country Status (1)

Country Link
JP (1) JPS6164179A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137491A (ja) * 1986-11-29 1988-06-09 Shimadzu Corp 圧電素子型センサ
JPH04306011A (ja) * 1991-04-02 1992-10-28 Murata Mfg Co Ltd 圧電共振子
US5828159A (en) * 1994-06-17 1998-10-27 Fujitsu Limited Resonator device adapted for suppression of fluctuation in resonant resistance, and method of producing same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137491A (ja) * 1986-11-29 1988-06-09 Shimadzu Corp 圧電素子型センサ
JPH04306011A (ja) * 1991-04-02 1992-10-28 Murata Mfg Co Ltd 圧電共振子
US5828159A (en) * 1994-06-17 1998-10-27 Fujitsu Limited Resonator device adapted for suppression of fluctuation in resonant resistance, and method of producing same
US6141844A (en) * 1994-06-17 2000-11-07 Fujitsu Limited Method of manufacturing a resonator device adapted for suppression of fluctuation in resonant resistance

Also Published As

Publication number Publication date
JPH0510837B2 (enExample) 1993-02-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term