JPH0510837B2 - - Google Patents
Info
- Publication number
- JPH0510837B2 JPH0510837B2 JP59187156A JP18715684A JPH0510837B2 JP H0510837 B2 JPH0510837 B2 JP H0510837B2 JP 59187156 A JP59187156 A JP 59187156A JP 18715684 A JP18715684 A JP 18715684A JP H0510837 B2 JPH0510837 B2 JP H0510837B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating protective
- protective film
- zinc oxide
- film
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 66
- 230000001681 protective effect Effects 0.000 claims abstract description 42
- 239000013078 crystal Substances 0.000 claims abstract description 34
- 239000011787 zinc oxide Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract description 2
- 238000002161 passivation Methods 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 11
- 238000009826 distribution Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Transducers For Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59187156A JPS6164179A (ja) | 1984-09-05 | 1984-09-05 | 圧電装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59187156A JPS6164179A (ja) | 1984-09-05 | 1984-09-05 | 圧電装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164179A JPS6164179A (ja) | 1986-04-02 |
| JPH0510837B2 true JPH0510837B2 (enExample) | 1993-02-10 |
Family
ID=16201101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59187156A Granted JPS6164179A (ja) | 1984-09-05 | 1984-09-05 | 圧電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164179A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63137491A (ja) * | 1986-11-29 | 1988-06-09 | Shimadzu Corp | 圧電素子型センサ |
| JPH04306011A (ja) * | 1991-04-02 | 1992-10-28 | Murata Mfg Co Ltd | 圧電共振子 |
| JPH088682A (ja) * | 1994-06-17 | 1996-01-12 | Fujitsu Ltd | 直列共振デバイス及びその製造方法と試験方法 |
-
1984
- 1984-09-05 JP JP59187156A patent/JPS6164179A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6164179A (ja) | 1986-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |