JPS6163514A - モノシランの精製方法 - Google Patents

モノシランの精製方法

Info

Publication number
JPS6163514A
JPS6163514A JP18277184A JP18277184A JPS6163514A JP S6163514 A JPS6163514 A JP S6163514A JP 18277184 A JP18277184 A JP 18277184A JP 18277184 A JP18277184 A JP 18277184A JP S6163514 A JPS6163514 A JP S6163514A
Authority
JP
Japan
Prior art keywords
gas
monosilane
condenser
unreduced
condensed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18277184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436089B2 (enrdf_load_stackoverflow
Inventor
Atsuhiko Hiai
日合　淳彦
Kazuo Wakimura
脇村　和生
Masao Tanaka
田中　将夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18277184A priority Critical patent/JPS6163514A/ja
Publication of JPS6163514A publication Critical patent/JPS6163514A/ja
Publication of JPH0436089B2 publication Critical patent/JPH0436089B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP18277184A 1984-09-03 1984-09-03 モノシランの精製方法 Granted JPS6163514A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277184A JPS6163514A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277184A JPS6163514A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Publications (2)

Publication Number Publication Date
JPS6163514A true JPS6163514A (ja) 1986-04-01
JPH0436089B2 JPH0436089B2 (enrdf_load_stackoverflow) 1992-06-15

Family

ID=16124130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277184A Granted JPS6163514A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Country Status (1)

Country Link
JP (1) JPS6163514A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994012837A1 (en) * 1992-12-01 1994-06-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Ultra-high purity monosilane producing process and unit
WO1995026927A1 (en) * 1994-03-30 1995-10-12 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method of producing ultra high purity monosilane and apparatus therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5869715A (ja) * 1981-10-21 1983-04-26 Mitsui Toatsu Chem Inc モノシランの精製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5869715A (ja) * 1981-10-21 1983-04-26 Mitsui Toatsu Chem Inc モノシランの精製方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994012837A1 (en) * 1992-12-01 1994-06-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Ultra-high purity monosilane producing process and unit
US5499506A (en) * 1992-12-01 1996-03-19 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Ultra-high purity monosilane producing process and unit
WO1995026927A1 (en) * 1994-03-30 1995-10-12 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method of producing ultra high purity monosilane and apparatus therefor

Also Published As

Publication number Publication date
JPH0436089B2 (enrdf_load_stackoverflow) 1992-06-15

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