JPS641405B2 - - Google Patents
Info
- Publication number
- JPS641405B2 JPS641405B2 JP16728481A JP16728481A JPS641405B2 JP S641405 B2 JPS641405 B2 JP S641405B2 JP 16728481 A JP16728481 A JP 16728481A JP 16728481 A JP16728481 A JP 16728481A JP S641405 B2 JPS641405 B2 JP S641405B2
- Authority
- JP
- Japan
- Prior art keywords
- monosilane
- impurities
- ethane
- monochlorosilane
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16728481A JPS5869715A (ja) | 1981-10-21 | 1981-10-21 | モノシランの精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16728481A JPS5869715A (ja) | 1981-10-21 | 1981-10-21 | モノシランの精製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5869715A JPS5869715A (ja) | 1983-04-26 |
| JPS641405B2 true JPS641405B2 (enrdf_load_stackoverflow) | 1989-01-11 |
Family
ID=15846895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16728481A Granted JPS5869715A (ja) | 1981-10-21 | 1981-10-21 | モノシランの精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5869715A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4554141A (en) * | 1984-05-14 | 1985-11-19 | Ethyl Corporation | Gas stream purification |
| JPS6163514A (ja) * | 1984-09-03 | 1986-04-01 | Mitsui Toatsu Chem Inc | モノシランの精製方法 |
| FR2652346B1 (fr) * | 1989-09-22 | 1991-11-29 | Air Liquide | Procede de preparation de disilane. |
| JP4843553B2 (ja) * | 2007-05-09 | 2011-12-21 | 株式会社コロナ | 一体型空気調和機 |
| KR101159674B1 (ko) * | 2009-11-16 | 2012-06-25 | 주식회사 케이씨씨 | 모노실란의 정제방법 |
-
1981
- 1981-10-21 JP JP16728481A patent/JPS5869715A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5869715A (ja) | 1983-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4917711A (en) | Adsorbents for use in the separation of carbon monoxide and/or unsaturated hydrocarbons from mixed gases | |
| US5051117A (en) | Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds | |
| CN107848796B (zh) | 氢气回收系统及氢气的分离回收方法 | |
| JP5232686B2 (ja) | ガスの精製方法および精製装置 | |
| EP0132915B1 (en) | Method of preparing solid adsorbent for unsaturated hydrocarbon and process for separation of unsaturated hydrocarbon from gas mixture | |
| CN86102838A (zh) | 高效吸附剂及其制备方法和应用 | |
| US3597167A (en) | Removal of chlorine and organic impurities from hydrochloric acid | |
| JP2008143775A (ja) | 水素分離回収方法および水素分離回収設備 | |
| JP6698762B2 (ja) | 水素ガス回収システムおよび水素ガスの分離回収方法 | |
| JPS641405B2 (enrdf_load_stackoverflow) | ||
| JP2570409B2 (ja) | クロロポリシランの精製方法 | |
| JPH0353017B2 (enrdf_load_stackoverflow) | ||
| JP2641265B2 (ja) | 水素の精製方法 | |
| JP3516716B2 (ja) | トリフルオロメタンの精製法 | |
| JPS61197415A (ja) | ジクロロシランの精製法 | |
| JPH0211522B2 (enrdf_load_stackoverflow) | ||
| JPH0710339B2 (ja) | 一酸化炭素吸着剤 | |
| JPH09169777A (ja) | ジメチルジクロロシランからメチルトリクロロシランを分離する方法 | |
| JPS6090810A (ja) | フルオロシランガスの製造方法 | |
| JP2931660B2 (ja) | 四弗化ケイ素ガスの精製方法 | |
| JPH01190676A (ja) | ２，２，３，３−テトラフルオロオキセタンの精製方法 | |
| JP2940120B2 (ja) | 高純度ジシランの製造方法 | |
| JPH0352406B2 (enrdf_load_stackoverflow) | ||
| JPH0716604B2 (ja) | 一酸化炭素吸着剤 | |
| CN114180535A (zh) | 一种四氟化硫的生产提纯工艺及系统 |