JPH0436090B2 - - Google Patents

Info

Publication number
JPH0436090B2
JPH0436090B2 JP59182772A JP18277284A JPH0436090B2 JP H0436090 B2 JPH0436090 B2 JP H0436090B2 JP 59182772 A JP59182772 A JP 59182772A JP 18277284 A JP18277284 A JP 18277284A JP H0436090 B2 JPH0436090 B2 JP H0436090B2
Authority
JP
Japan
Prior art keywords
monosilane
ppm
oxygen
nitrogen
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59182772A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163515A (ja
Inventor
Atsuhiko Hiai
Kazuo Wakimura
Masao Tanaka
Nobuhiro Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18277284A priority Critical patent/JPS6163515A/ja
Publication of JPS6163515A publication Critical patent/JPS6163515A/ja
Publication of JPH0436090B2 publication Critical patent/JPH0436090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP18277284A 1984-09-03 1984-09-03 モノシランの製造方法 Granted JPS6163515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277284A JPS6163515A (ja) 1984-09-03 1984-09-03 モノシランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277284A JPS6163515A (ja) 1984-09-03 1984-09-03 モノシランの製造方法

Publications (2)

Publication Number Publication Date
JPS6163515A JPS6163515A (ja) 1986-04-01
JPH0436090B2 true JPH0436090B2 (enrdf_load_stackoverflow) 1992-06-15

Family

ID=16124147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277284A Granted JPS6163515A (ja) 1984-09-03 1984-09-03 モノシランの製造方法

Country Status (1)

Country Link
JP (1) JPS6163515A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6416568B1 (en) * 1999-05-14 2002-07-09 Texaco, Inc. Hydrogen recycle and acid gas removal using a membrane
JP5338030B2 (ja) * 2007-01-31 2013-11-13 大正製薬株式会社 アダパレン含有外用剤組成物
ATE508985T1 (de) 2007-03-30 2011-05-15 Spawnt Private Sarl Katalytische hydrierung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120511A (ja) * 1982-01-07 1983-07-18 Matsushita Electric Ind Co Ltd シランの精製法

Also Published As

Publication number Publication date
JPS6163515A (ja) 1986-04-01

Similar Documents

Publication Publication Date Title
RU2368568C2 (ru) Способ получения кремния
JP5122700B1 (ja) モノシランの精製方法
WO2012056621A1 (ja) クロロシラン類の精製方法
JP2012158515A (ja) クロロシランの蒸留による精製方法
EP1867604B1 (en) Method for purification of disilicon hexachloride and high purity disilicon hexachloride
EP0510529B1 (en) Purification of sulfur hexafluoride
JP2719211B2 (ja) 高次シランの製造法
JPH0436090B2 (enrdf_load_stackoverflow)
JP6984446B2 (ja) 高純度三塩化ホウ素の製造方法
US4696953A (en) Scavengers for the removal of impurities from arsine and phosphine
CN1769289B (zh) 有机金属化合物精制方法及由此制得的有机金属化合物
US4716181A (en) Scavengers for the removal of impurities from arsine and phosphine
JP7069473B2 (ja) 高純度三塩化ホウ素の製造方法
WO2014163414A1 (ko) 폴리실란 제조방법
CN223069100U (zh) 一种降低多晶硅中施、受主杂质的氯硅烷原料提纯系统
JP3827358B2 (ja) 塩酸水溶液の製造方法
JP2019119614A (ja) 高純度三塩化ホウ素の製造方法
JPS641405B2 (enrdf_load_stackoverflow)
JPS6197129A (ja) フルオロシラン類の精製法
JPS59116117A (ja) 水素化ケイ素の新製造方法
JP4498152B2 (ja) トリメチルシランの精製方法
JPH0459518B2 (enrdf_load_stackoverflow)
JPH0480848B2 (enrdf_load_stackoverflow)
JPH06220069A (ja) タンタルアルコキシドの精製方法、及び高純度タンタルアルコキシド並びにこれを用いた気相成長法
JP2001048519A (ja) フルオロシランガスの精製方法