JPS6161255B2 - - Google Patents

Info

Publication number
JPS6161255B2
JPS6161255B2 JP54033744A JP3374479A JPS6161255B2 JP S6161255 B2 JPS6161255 B2 JP S6161255B2 JP 54033744 A JP54033744 A JP 54033744A JP 3374479 A JP3374479 A JP 3374479A JP S6161255 B2 JPS6161255 B2 JP S6161255B2
Authority
JP
Japan
Prior art keywords
chip
mark
circuit
detection circuit
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54033744A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55125640A (en
Inventor
Masayuki Naruse
Shige Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3374479A priority Critical patent/JPS55125640A/ja
Publication of JPS55125640A publication Critical patent/JPS55125640A/ja
Publication of JPS6161255B2 publication Critical patent/JPS6161255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3374479A 1979-03-22 1979-03-22 Automatic chip selection apparatus Granted JPS55125640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3374479A JPS55125640A (en) 1979-03-22 1979-03-22 Automatic chip selection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3374479A JPS55125640A (en) 1979-03-22 1979-03-22 Automatic chip selection apparatus

Publications (2)

Publication Number Publication Date
JPS55125640A JPS55125640A (en) 1980-09-27
JPS6161255B2 true JPS6161255B2 (enExample) 1986-12-24

Family

ID=12394915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3374479A Granted JPS55125640A (en) 1979-03-22 1979-03-22 Automatic chip selection apparatus

Country Status (1)

Country Link
JP (1) JPS55125640A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167651A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Inspecting device for surface of semiconductor wafer
JPS58200550A (ja) * 1982-05-18 1983-11-22 Marine Instr Co Ltd Ｉｃチツプの摘出方法及びその装置
JP5282702B2 (ja) * 2009-08-21 2013-09-04 信越半導体株式会社 外観検査装置

Also Published As

Publication number Publication date
JPS55125640A (en) 1980-09-27

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