JPS6161221B2 - - Google Patents

Info

Publication number
JPS6161221B2
JPS6161221B2 JP54028905A JP2890579A JPS6161221B2 JP S6161221 B2 JPS6161221 B2 JP S6161221B2 JP 54028905 A JP54028905 A JP 54028905A JP 2890579 A JP2890579 A JP 2890579A JP S6161221 B2 JPS6161221 B2 JP S6161221B2
Authority
JP
Japan
Prior art keywords
signal
circuit
electron microscope
pulse signal
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54028905A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55121256A (en
Inventor
Koro Ooi
Koichi Koshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP2890579A priority Critical patent/JPS55121256A/ja
Publication of JPS55121256A publication Critical patent/JPS55121256A/ja
Publication of JPS6161221B2 publication Critical patent/JPS6161221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2890579A 1979-03-13 1979-03-13 Correcting method of drift in electron microscope Granted JPS55121256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2890579A JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2890579A JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Publications (2)

Publication Number Publication Date
JPS55121256A JPS55121256A (en) 1980-09-18
JPS6161221B2 true JPS6161221B2 (ru) 1986-12-24

Family

ID=12261415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2890579A Granted JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Country Status (1)

Country Link
JP (1) JPS55121256A (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60232656A (ja) * 1984-04-28 1985-11-19 Nissin Electric Co Ltd イオン注入装置
JPS63202834A (ja) * 1987-02-17 1988-08-22 Jeol Ltd 電子顕微鏡のドリフト補正装置
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device
JPS51134555A (en) * 1975-05-16 1976-11-22 Jeol Ltd Sample drift corrector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device
JPS51134555A (en) * 1975-05-16 1976-11-22 Jeol Ltd Sample drift corrector

Also Published As

Publication number Publication date
JPS55121256A (en) 1980-09-18

Similar Documents

Publication Publication Date Title
JP2563134B2 (ja) 走査透過型位相差電子顕微鏡
US4365269A (en) X-Ray diagnostic installation comprising a solid state image converter
US3968404A (en) Arrangement for controlling the vertical deflection of a flying spot tube
JPS62299928A (ja) 走査型光学顕微鏡
JPS6161221B2 (ru)
US3389294A (en) Imaging system in which the size and centering of the raster are kept constant
JPH09306407A (ja) 走査電子顕微鏡
JPS6166352A (ja) 走査電子顕微鏡
JPS5854464B2 (ja) 電子顕微鏡におけるドリフト補正方法
SU1059701A1 (ru) Устройство автоматической коррекции координатных искажений растра
JPS61220261A (ja) 試料表面の対象区域をわき立たせる方法と装置
JP3664261B2 (ja) トンネルスペクトロスコピー
JPS63116348A (ja) 電子線装置の視野対応装置
JPH0219682Y2 (ru)
SU884005A1 (ru) Способ измерени диаметра электронного зонда в растровом электронном микроскопе
KR830002860Y1 (ko) 주사전자현미경 및 그 유사장치의 주사상 관찰장치
JPS6220478A (ja) 固体撮像装置
JPS58709B2 (ja) ジドウシヨウテンチヨウセツソウチ
SU913479A1 (ru) Видеоконтрольное устройство электронного микроскопа с отклоняющей системой
JPS59224038A (ja) 荷電粒子線走査型分析装置
JPS6145549A (ja) 荷電粒子線装置
JPS5993492A (ja) 陰極線表示管を用いた表示装置
JP3449085B2 (ja) 映像表示装置
JPH0417508B2 (ru)
SU811363A1 (ru) Видеоконтрольное устройство дл элЕКТРОННОгО МиКРОСКОпА