JPS6159616A - 磁気ヘツドコアの製造方法 - Google Patents

磁気ヘツドコアの製造方法

Info

Publication number
JPS6159616A
JPS6159616A JP18208784A JP18208784A JPS6159616A JP S6159616 A JPS6159616 A JP S6159616A JP 18208784 A JP18208784 A JP 18208784A JP 18208784 A JP18208784 A JP 18208784A JP S6159616 A JPS6159616 A JP S6159616A
Authority
JP
Japan
Prior art keywords
electron beam
film
evaporation
vapor deposition
head core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18208784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320810B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kumio Nako
久美男 名古
▲かど▼野　勝
Masaru Kadono
Shuhei Tsuchimoto
修平 土本
Mitsuhiko Yoshikawa
吉川　光彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP18208784A priority Critical patent/JPS6159616A/ja
Priority to US06/664,425 priority patent/US4592923A/en
Publication of JPS6159616A publication Critical patent/JPS6159616A/ja
Publication of JPH0320810B2 publication Critical patent/JPH0320810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Heads (AREA)
JP18208784A 1983-10-24 1984-08-29 磁気ヘツドコアの製造方法 Granted JPS6159616A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP18208784A JPS6159616A (ja) 1984-08-29 1984-08-29 磁気ヘツドコアの製造方法
US06/664,425 US4592923A (en) 1983-10-24 1984-10-24 Production method of a high magnetic permeability film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18208784A JPS6159616A (ja) 1984-08-29 1984-08-29 磁気ヘツドコアの製造方法

Publications (2)

Publication Number Publication Date
JPS6159616A true JPS6159616A (ja) 1986-03-27
JPH0320810B2 JPH0320810B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-20

Family

ID=16112132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18208784A Granted JPS6159616A (ja) 1983-10-24 1984-08-29 磁気ヘツドコアの製造方法

Country Status (1)

Country Link
JP (1) JPS6159616A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890513A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-02 1973-11-26
JPS599905A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド
JPS59130408A (ja) * 1983-01-17 1984-07-27 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890513A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-02 1973-11-26
JPS599905A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド
JPS59130408A (ja) * 1983-01-17 1984-07-27 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド

Also Published As

Publication number Publication date
JPH0320810B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-20

Similar Documents

Publication Publication Date Title
JPH0466366B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61233405A (ja) 磁気ヘツド
JPS6159616A (ja) 磁気ヘツドコアの製造方法
JPH0243243B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02121309A (ja) Ｆｅ−Ｓｉ−Ａｌ磁芯の製造法及びそれを用いた磁気ヘッド
US4592923A (en) Production method of a high magnetic permeability film
JPH0159727B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6091617A (ja) 磁性合金膜の製造方法
JPS6062105A (ja) 高透磁率合金膜の製造方法
JPH02430B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS58100412A (ja) 軟質磁性材料の製法
JPH0673532A (ja) 合金膜の製造方法
JPS6362805B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63155604A (ja) 多層磁性膜及びその製造方法
JPH02258614A (ja) 低アルゴン含有ＳｉＯ↓２析着膜とその製造方法
JPH0785290B2 (ja) 磁気ヘッドコアの製造方法
JPH0584566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH07116564B2 (ja) 磁性合金
JPS61265715A (ja) 磁気ヘツドコア用部材
JPH01146312A (ja) 軟磁性薄膜
JPH01194120A (ja) 磁気ヘッド及びその製造方法
JPS63281250A (ja) 磁気光学薄膜材料及びその製造方法
JPS60261006A (ja) 磁気ヘツドの製造方法
JPS63261709A (ja) 軟磁性積層膜の製造方法
JPH0329304A (ja) 軟磁性薄膜ならびにその製造方法