JPS6158884B2 - - Google Patents
Info
- Publication number
- JPS6158884B2 JPS6158884B2 JP11527776A JP11527776A JPS6158884B2 JP S6158884 B2 JPS6158884 B2 JP S6158884B2 JP 11527776 A JP11527776 A JP 11527776A JP 11527776 A JP11527776 A JP 11527776A JP S6158884 B2 JPS6158884 B2 JP S6158884B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- glass
- sputtering
- ferrite
- high permeability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 35
- 229910000859 α-Fe Inorganic materials 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 22
- 239000011521 glass Substances 0.000 claims description 21
- 230000035699 permeability Effects 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 239000000696 magnetic material Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002889 diamagnetic material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002907 paramagnetic material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11527776A JPS5339724A (en) | 1976-09-24 | 1976-09-24 | Preparation of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11527776A JPS5339724A (en) | 1976-09-24 | 1976-09-24 | Preparation of magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5339724A JPS5339724A (en) | 1978-04-11 |
| JPS6158884B2 true JPS6158884B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-13 |
Family
ID=14658665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11527776A Granted JPS5339724A (en) | 1976-09-24 | 1976-09-24 | Preparation of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5339724A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5585671A (en) * | 1978-12-21 | 1980-06-27 | Nippon Denso Co Ltd | Sputtering apparatus |
| JP2761875B2 (ja) * | 1987-08-25 | 1998-06-04 | キヤノン株式会社 | バイアススパッタリング法による堆積膜形成装置 |
-
1976
- 1976-09-24 JP JP11527776A patent/JPS5339724A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5339724A (en) | 1978-04-11 |