JPS6155731B2 - - Google Patents

Info

Publication number
JPS6155731B2
JPS6155731B2 JP54097115A JP9711579A JPS6155731B2 JP S6155731 B2 JPS6155731 B2 JP S6155731B2 JP 54097115 A JP54097115 A JP 54097115A JP 9711579 A JP9711579 A JP 9711579A JP S6155731 B2 JPS6155731 B2 JP S6155731B2
Authority
JP
Japan
Prior art keywords
target
electron beam
rotating
sample
deflection plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54097115A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5621324A (en
Inventor
Masahiro Okabe
Yoshitaka Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9711579A priority Critical patent/JPS5621324A/ja
Publication of JPS5621324A publication Critical patent/JPS5621324A/ja
Publication of JPS6155731B2 publication Critical patent/JPS6155731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9711579A 1979-07-30 1979-07-30 X-ray generator Granted JPS5621324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9711579A JPS5621324A (en) 1979-07-30 1979-07-30 X-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9711579A JPS5621324A (en) 1979-07-30 1979-07-30 X-ray generator

Publications (2)

Publication Number Publication Date
JPS5621324A JPS5621324A (en) 1981-02-27
JPS6155731B2 true JPS6155731B2 (enExample) 1986-11-28

Family

ID=14183565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9711579A Granted JPS5621324A (en) 1979-07-30 1979-07-30 X-ray generator

Country Status (1)

Country Link
JP (1) JPS5621324A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178325A (en) * 1981-04-28 1982-11-02 Nec Corp X-ray exposer
JP5138782B2 (ja) * 2007-12-31 2013-02-06 ゼネラル・エレクトリック・カンパニイ 可動高フラックスｘ線ターゲット及び組立体
WO2009136349A2 (en) * 2008-05-09 2009-11-12 Philips Intellectual Property & Standards Gmbh X-Ray Examination System with Integrated Actuator Means for Performing Translational and/or Rotational Disuplacement Movements of at Least One X-Radiation Emitting Anode's Focal Spot Relative to a Stationary Reference Position and Means for Compensating Resulting Parallel and/or Angular Shifts of the Emitted X-Ray Beams

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271185A (en) * 1975-12-11 1977-06-14 Toshiba Corp Rotating anode x-ray tube

Also Published As

Publication number Publication date
JPS5621324A (en) 1981-02-27

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