JPS615541A - 移し替え装置 - Google Patents

移し替え装置

Info

Publication number
JPS615541A
JPS615541A JP59125229A JP12522984A JPS615541A JP S615541 A JPS615541 A JP S615541A JP 59125229 A JP59125229 A JP 59125229A JP 12522984 A JP12522984 A JP 12522984A JP S615541 A JPS615541 A JP S615541A
Authority
JP
Japan
Prior art keywords
wafer
cartridge
wafers
pusher
box body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59125229A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527257B2 (2
Inventor
Kunihiko Murakami
邦彦 村上
Hatsuo Hiraide
平出　初男
Hajime Yui
肇 油井
Ryosaku Chikaoka
近岡　良作
Kazuhiko Takahashi
和彦 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP59125229A priority Critical patent/JPS615541A/ja
Publication of JPS615541A publication Critical patent/JPS615541A/ja
Publication of JPH0527257B2 publication Critical patent/JPH0527257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H10P72/3412—Batch transfer of wafers

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP59125229A 1984-06-20 1984-06-20 移し替え装置 Granted JPS615541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125229A JPS615541A (ja) 1984-06-20 1984-06-20 移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125229A JPS615541A (ja) 1984-06-20 1984-06-20 移し替え装置

Publications (2)

Publication Number Publication Date
JPS615541A true JPS615541A (ja) 1986-01-11
JPH0527257B2 JPH0527257B2 (2) 1993-04-20

Family

ID=14905014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125229A Granted JPS615541A (ja) 1984-06-20 1984-06-20 移し替え装置

Country Status (1)

Country Link
JP (1) JPS615541A (2)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS638243U (2) * 1986-07-01 1988-01-20
JPH01122135A (ja) * 1987-11-06 1989-05-15 Seiko Epson Corp 半導体製造装置
JPH0276227A (ja) * 1988-09-12 1990-03-15 Sugai:Kk 基板の洗浄乾燥方法及びその装置
JPH02215570A (ja) * 1989-02-16 1990-08-28 Matsushita Electric Ind Co Ltd 印字装置
CN113247611A (zh) * 2021-04-20 2021-08-13 深圳市真味生物科技有限公司 一种电子雾化液调味瓶选取系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139378A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Integrated treatment apparatus for semiconductor wafers
JPS5434774A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Article transfer device
JPS5483371U (2) * 1977-11-17 1979-06-13
JPS5643718A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Semiconductor wafer shifting device
JPS56161653A (en) * 1980-05-16 1981-12-12 Fujitsu Ltd Replacing device of wafer
JPS60258459A (ja) * 1984-06-04 1985-12-20 Deisuko Saiyaa Japan:Kk 縦型熱処理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139378A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Integrated treatment apparatus for semiconductor wafers
JPS5434774A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Article transfer device
JPS5483371U (2) * 1977-11-17 1979-06-13
JPS5643718A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Semiconductor wafer shifting device
JPS56161653A (en) * 1980-05-16 1981-12-12 Fujitsu Ltd Replacing device of wafer
JPS60258459A (ja) * 1984-06-04 1985-12-20 Deisuko Saiyaa Japan:Kk 縦型熱処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS638243U (2) * 1986-07-01 1988-01-20
JPH01122135A (ja) * 1987-11-06 1989-05-15 Seiko Epson Corp 半導体製造装置
JPH0276227A (ja) * 1988-09-12 1990-03-15 Sugai:Kk 基板の洗浄乾燥方法及びその装置
JPH02215570A (ja) * 1989-02-16 1990-08-28 Matsushita Electric Ind Co Ltd 印字装置
CN113247611A (zh) * 2021-04-20 2021-08-13 深圳市真味生物科技有限公司 一种电子雾化液调味瓶选取系统

Also Published As

Publication number Publication date
JPH0527257B2 (2) 1993-04-20

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