JPS5483371U - - Google Patents
Info
- Publication number
- JPS5483371U JPS5483371U JP15492377U JP15492377U JPS5483371U JP S5483371 U JPS5483371 U JP S5483371U JP 15492377 U JP15492377 U JP 15492377U JP 15492377 U JP15492377 U JP 15492377U JP S5483371 U JPS5483371 U JP S5483371U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15492377U JPS5483371U (2) | 1977-11-17 | 1977-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15492377U JPS5483371U (2) | 1977-11-17 | 1977-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5483371U true JPS5483371U (2) | 1979-06-13 |
Family
ID=29143475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15492377U Pending JPS5483371U (2) | 1977-11-17 | 1977-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5483371U (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS615541A (ja) * | 1984-06-20 | 1986-01-11 | Hitachi Electronics Eng Co Ltd | 移し替え装置 |
| JPS6154639A (ja) * | 1984-08-27 | 1986-03-18 | Hitachi Ltd | 半導体ウエ−ハ移し換え装置 |
-
1977
- 1977-11-17 JP JP15492377U patent/JPS5483371U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS615541A (ja) * | 1984-06-20 | 1986-01-11 | Hitachi Electronics Eng Co Ltd | 移し替え装置 |
| JPS6154639A (ja) * | 1984-08-27 | 1986-03-18 | Hitachi Ltd | 半導体ウエ−ハ移し換え装置 |