JPS615438A - 磁気記憶体の製造方法 - Google Patents
磁気記憶体の製造方法Info
- Publication number
- JPS615438A JPS615438A JP12611784A JP12611784A JPS615438A JP S615438 A JPS615438 A JP S615438A JP 12611784 A JP12611784 A JP 12611784A JP 12611784 A JP12611784 A JP 12611784A JP S615438 A JPS615438 A JP S615438A
- Authority
- JP
- Japan
- Prior art keywords
- magnetite
- torr
- iron oxide
- sputtering
- oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 230000003647 oxidation Effects 0.000 claims abstract description 15
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 15
- 238000004544 sputter deposition Methods 0.000 claims abstract description 15
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000654 additive Substances 0.000 claims abstract description 8
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 3
- 239000010409 thin film Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 8
- 230000003247 decreasing effect Effects 0.000 abstract 3
- 238000005336 cracking Methods 0.000 abstract 2
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 abstract 2
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- 230000000996 additive effect Effects 0.000 abstract 1
- 238000007743 anodising Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12611784A JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12611784A JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS615438A true JPS615438A (ja) | 1986-01-11 |
| JPH0552567B2 JPH0552567B2 (enrdf_load_stackoverflow) | 1993-08-05 |
Family
ID=14927057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12611784A Granted JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615438A (enrdf_load_stackoverflow) |
-
1984
- 1984-06-19 JP JP12611784A patent/JPS615438A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0552567B2 (enrdf_load_stackoverflow) | 1993-08-05 |
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