JPH0552567B2 - - Google Patents
Info
- Publication number
- JPH0552567B2 JPH0552567B2 JP12611784A JP12611784A JPH0552567B2 JP H0552567 B2 JPH0552567 B2 JP H0552567B2 JP 12611784 A JP12611784 A JP 12611784A JP 12611784 A JP12611784 A JP 12611784A JP H0552567 B2 JPH0552567 B2 JP H0552567B2
- Authority
- JP
- Japan
- Prior art keywords
- iron oxide
- thin film
- magnetite
- mainly composed
- containing additives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 28
- 239000010409 thin film Substances 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 229910001566 austenite Inorganic materials 0.000 claims description 9
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 239000000654 additive Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 230000008685 targeting Effects 0.000 claims description 2
- 229910000859 α-Fe Inorganic materials 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12611784A JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12611784A JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS615438A JPS615438A (ja) | 1986-01-11 |
| JPH0552567B2 true JPH0552567B2 (enrdf_load_stackoverflow) | 1993-08-05 |
Family
ID=14927057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12611784A Granted JPS615438A (ja) | 1984-06-19 | 1984-06-19 | 磁気記憶体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615438A (enrdf_load_stackoverflow) |
-
1984
- 1984-06-19 JP JP12611784A patent/JPS615438A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS615438A (ja) | 1986-01-11 |
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